March 28, 2024 UMD Home NanoCenter AIMLab

Ongoing

Metra thermal evaporator off line due to pump failure.

Ongoing

the Hitachi S3400N is back online.

Ongoing

The`Raith's laser that controls the stage has been replaced and the tool is back online.

Ongoing

All Gold depositions in the e-beams will need to be run by the staff until further notice.

Ongoing

The BET system is not operating properly. A service has been unsuccessful. We are waiting to hear when a more comprehensive service can be performed.

Ongoing

Beneq ALD TMA precursor was refilled with limited amount. More is one the way. Notify the staff if you notice low/no pulses. Once additional TMA arrives, the tool will be taken offline again for short period of time. If you notice the reactor pressure greater than 5 mbar, notify the staff immediately.

Ongoing

New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.

Ongoing

If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.

Ongoing

External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.

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