Maryland NanoCenter
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Nanofabrication Laboratory

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Lab Director: James O'Connor
Type: shared
Location: 2310 Kim bldg
Webpage: http://www.nanocenter.umd.edu/labs/FabLab/
Description: The FabLab is the primary cleanroom affiliated with the Maryland NanoCenter. As a large class 1000 facility, it contains processing equipment for lithography, deposition, etching, planarization, and other operations essential to fabrication of micro- and nano- structures. The FabLab also includes auxiliary spaces for exploratory processes, teaching microfabrication methods, support equipment, characterization, and operations.
Equipment
3" Mask Aligner
4" Mask Aligner
Airco BJD 1800 bell-jar e-beam dep
Bio RAD RTA
Cooke Thermal Deposition Tool
DI H2O purifier
Ebeam Deposition Tool
EVG IR wafer bonder inspection
EVG Wafer Bonder
Flourine RIE-2
Fusion deep UV curing
Headway spinner
Headway spinner
Headway spinner
Heat Pulse RTA
homemade atmospheric furnace
JEOL SEM/litho
K&S bonder
KLA-Tencor AlphaStep 200
Leitz microscope #2
Leitz microscope #3
LPS custom S-gun sputter deposition
Metra Thermal Deposition Tool
MRC 603 sputter deposition
Nikon microscope #4
Oxide/Nitride RIE
Photoresist Strip Tool
Sputter Deposition Tool
STS Deep RIE etcher
teaching hood 4
teaching hood 5
Tystar 3-tube furnace
UV ozone cleaner
vacuum hotplate #1
vacuum hotplate #2