Lab for Advanced Electronic Materials Processing

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Lab Director: Gary W. Rubloff Lab Manager: Laurent Henn-Lecordier Type: research Phone Number: (301) 405-7250 Location: 2225 J.M. Patterson Bldg Webpage: http://www.enma.umd.edu/LAMP/ Description: The Laboratory for Advanced Materials Processing - LAMP - is a class 1000 clean room facility and an exploratory laboratory for advanced processes and for materials processing not routinely done in FabLab. Current emphasis is on (1) atomic layer deposition (ALD) for a variety of applications, (2) spatially programmable chemical vapor deposition (SP-CVD) as a new paradigm for equipment and process design, and (3) biological microsystems.

Equipment atomic layer deposition furnace confocal/fluorescence microscope custom scanning wafer probe (4PP etc.) laminar flow hood laminar flow hood spatially programmable CVD UHV atomic layer deposition