Maryland NanoCenter
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MEMS Sensors and Actuators Lab

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Lab Director: Reza Ghodssi
Type: research
Phone Number: (301) 405-1897
Location: 2201 J.M. Patterson bldg
Webpage: http://www.ece.umd.edu/MEMS/
Description: Our research group focuses on Integrative MEMS and Microsystems with a strong emphasis on development of novel MEMS microfabrication technologies to address systems integration. The new technologies enable the integration of MEMS and electronic devices for development of "Systems-on-a-Chip" with a focus on improving their long term reliabilities.