Location |
| 2302 Jeong H. Kim Engineering Building |
Important Contacts |
| Jim O’Connor | 301-405-5018 |
| John Abrahams | 301-405-6664 |
| Jon Hummel | 301-405-5017 |
| Tom Loughran | 301-405-3642 |
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FabLab Floorplan
The FabLab is comprised of 3 main areas: Main Fab, Explor Lab, and the Teaching Lab.
Main Fab
The Main Fab is the primary cleanroom in Maryland NanoCenter. A large class 1000 facility, it contains processing equipment for lithography, deposition, etching, planarization, and other operations essential to fabrication of micro- and nano- structures. The FabLab also includes auxiliary spaces for exploratory processes, teaching microfabrication methods, support equipment, characterization, and operations.
Webcams:
Deposition Tunnel |
Litho Tunnel |
Etch Tunnel |
CVD Tunnel
Teaching Lab
The Teaching cleanroom in the FabLab complex contains process equipment for use by laboratory-based courses aimed at fabrication processes and device structures. Lab courses also take advantage of some equipment in the main cleanroom.
View Webcam
Explor Lab
The exploratory area of the FabLab is a class 100,000 area for use of exploratory materials and processes, involving equipment which is highly specialized for research or does not require the cleanliness of the FabLab cleanroom.
SEM Room
Instruments in the SEM room enables characterization of device structures being fabricated in the FabLab cleanroom.
Materials Handling Room
The materials handling room provides for organized management of the extensive materials and consumables used in the FabLab.
FabLab Control Room
The FabLab's control room provides equipment and safety monitoring systems in a central location for FabLab staff to oversee activities and operations.
Gowning Area
The gowning area supplies cleanroom garments for users of the FabLab.
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