NanoCenter facilities take a major leap forward

Recent developments in the NanoCenter have expanded capabilities for fabrication and characterization in an unprecedented way. Through the Sunny Day Fund of the State of Maryland's Department Business and Economic Development, the NanoCenter has received $3.65M for new equipment in its shared user facilities, as well as with over $1M from the university and $500K from a National Science Foundation MRI award. Together this growth catapults NanoCenter capability to several times what existing consolidated facilities represented, and it positions the NanoCenter at the cutting edge of nano research capability.

How it fits in

The NanoCenter already hosts a significant portfolio of equipment for nanofabrication, materials processing, and nanocharacterization, including tools from existing shared facilities on campus as well as those in individual or group research laboratories. The new facilities will greatly expand what the NanoCenter, its partners, and its users can accomplish in nanoscale science and technology.

Who is this for?

NanoCenter shared facilities are open to all at competitive rates. This includes external users, either as individual customers or for collaborative work with NanoCenter research groups. More information is available at the FabLab and NispLab websites, or contact:

Nanofabrication Facility FabLab Director Dr. Jim O'Connor 301 405-5018 joconnor@umd.edu The FabLab benefits from the added funding by adding key tools used in fabrication. Below is a list of tools that will be installed or upgraded in the FabLab this year. Nanolithography Raith eLine Electron Beam Lithography System Upgrade to the Jeol 840 FE-TEM Nanoscale Materials Processing Chemical Vapor Deposition (CVD) Growth System Atomic Layer Deposition (ALD) System Nanotube Growth System Thin Film Processing Plasma-enhanced Chemical Vapor Deposition Inductively-coupled Plasma (ICP) Etcher Thin Film Evaporator Materials Characterization Environmental Scanning Electron Microscope (ESEM) Agilent 4155C Semiconductor Paramter Analyzer and Wafer Probe Rudolph AutoEL III Ellipsometer

Microscopy Facility NispLab Director Dr. Wen-An Chiou 301 405-0541 wachiou@umd.edu The NispLab has received and installed a couple new TEMs allowing NanoCenter users better TEM options. Transmission Electron Miscroscopy (TEM) Jeol 2100F Field Emission Transmission Electron Microscope (FE-TEM) JEM 2100 LaB6 TEM Holders enhancements High temperature heating holder Liquid nitrogen temperature holder High angle tilting holder Tilting and rotation holder Scanning Electron Miscroscopy (SEM) Field Emission SEM with EDS capability