September 26, 2017 UMD Home FabLab AIMLab
Back to Equipment List Nanowire Growth System
Description The Atomate Nanowire Growth System uses a chemical vapor deposition process to grow doped silicon, germanium, or silicon germanium nanowires. During growth these structures can be doped with boron or phosphorous resulting in nanoscale diodes and transistors. Carbon based structures such as nanotubes and grapheme can also be grown but require a change of gases to methane and acetylene. Please see staff to change gases.

Several hazardous gases are plumbed into this system, including: silane, diborane, phosphine and hydrogen. Extreme care must be exercised by users.
Location FabLab | CVD Tunnel
Manufacturer Atomate
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
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Logs
Wed, Sep 28, 2016
9:00 am -
Zoey Warecki
View Reservation
Thu, Sep 08, 2016
- 9:00 am
Zoey Warecki
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Wed, Sep 07, 2016
3:00 pm -
Zoey Warecki
View Reservation
Thu, May 12, 2016
12:00 pm - 2:00 pm
Keith Gregorczyk
View Reservation

Deleted by: Ernie Cleveland

Annealing V2O5
Mon, May 09, 2016
2:30 pm - 3:30 pm
Keith Gregorczyk
View Reservation
Annealing polyimide at 260C
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SOPs
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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