May 4, 2024 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ● Online
Description

First 2 hours of the run:
$75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.

For runs over 2 hours:
$10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-V, 2-SiO2, 3-Al
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(10/11):
Au: $82 per 1000A
Pt: $70 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
05/06/2024 09:00 AM 10:00 AM Ghadah Alshalan
05/06/2024 10:30 AM 11:30 AM Andrew Evangelista
Logs
Mon, May 06, 2024
10:30 am - 11:30 am
Andrew Evangelista
View Reservation
AluminUM and iron
Mon, May 06, 2024
9:00 am - 10:00 am
Ghadah Alshalan
View Reservation
Ag
Thu, May 02, 2024
8:00 am - 2:00 pm
Bhuvsmita Bhargava
View Reservation
V, Al
Wed, May 01, 2024
1:00 pm - 2:00 pm
Yi-Siou Huang
View Reservation
SiO2
Tue, Apr 30, 2024
10:00 am - 3:00 pm
Andrew Evangelista
View Reservation
Gold (1000 A), silver, and alumina gold charge=$92
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2024