The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.
The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.
CVD tunnel shut down had to be extended. During the panel replacement work, it was found that the gas lines are contaminated and must be replaced to ensure process quality, i.e. no particles, prevent tool damage, and ensure safe operation of the gas handling systems. As of 2/10/2025, a new PO was submitted for this additional work. We are expecting to be done by the end of the month assuming we don't run into further complications. Please keep an eye on the announcement page for updates.
There is no MIBK for e-beam lithography development right now. It has been ordered, and this message will be updated when it arrives.
The BET system now back in operation! Due to the issues found during the repair, all samples must be prebaked at least over 100C overnight before degassing even . Any material that cannot be heated above 100C must be approved by the staff beforehand. Failure to do so will lead to the tool failure again. All sample tubes must be checked in/out. Its expected for users to take back their samples after analysis and return clean sample tubes. Contact Nam for further detail.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.
External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.
Both chlorine etchers currently do NOT have Hydrogen or Methane. Please adjust your processes as necessary. Gasses should be restored in approximately 4 weeks.
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
Current hours are:
7:00am - 5:00pm
Monday - Friday
The Main FabLab is open 24/7 with restricted after hours access between 8:00pm - 7:00am.
