August 8, 2020 UMD Home NanoCenter AIMLab
Maryland NanoCenter FabLab FabLab Teaching Lab

COVID-19 : NanoCenter Operations Information

Updated 6/8/2020

Please read our updates to our operations in FabLab, AIM Lab, and partner labs.

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The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.

Classes in FabLab

The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.

Click here to learn more about classes in the lab.



The FabLab is operating under Phase 1: Limited Presence Re-opening. Please check this page for more detail and operation updates.

Users will not be able to reserve equipment at this time for FabLab. Please contact specific FABLAB Staff member to make arrangements for using equipment.

A complete plan of use MUST be submitted to FABLAB Staff AT LEAST 24 hours in advance.

FABLAB Staff will make all reservations in order to limit users to Covid-19 safety protocol.


FLUORINE ETCHER - The tool is down. The PLC is bad and needs a complete upgrade. $$$$$$$$$. The tool will be down for at least 16 weeks.


New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.


As of July 1st, 2019 the FABLAB will charge for use of equipment that was previously been uncharged. The exception is when equipment is used as part of time reserved for a process tool. This includes- but it not limited to- Probe stations, profilometers, Raith off-line computer, microcscopes, ovens, Hall Effect, N&K, Ozone cleaner, Fusion Systems UV, etc. Remember- these are free if used as part of a charged process but you MUST make a reservation if used in a stand-alone mode.


ALD users- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc.


If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the notes section of your reservation. Otherwise you will be charged for the full rates.


EVG 620 aligner is off line due to a power supply issue. An assessment is being performed and hopefully we will have some answers in January.


New Gold and Palladium Prices. Effective 11/11/2019 Gold and Palladium will increase to $82/100nm of deposition.


REMOVER PG is only too be used in the dedicated stations. Do not remove Remover PG from the beakers. $150/gal


FLUORINE ETCHER-A new chiller was installed on 2/20/20. All programs have to be updated to run the proper temps with the chiller and oxford signals. see note at tool or see Mark


Woollam ellipsometry system is in horizontal mode.


The STS is back online


Branson Barrel asher is back on-line. 2/20/21

Using the lab

If you are interested in using the instruments in the lab please complete the steps on the Become a User page. Additionally, introduce yourself to the FabLab staff and discuss your project. This will allow us to understand your needs and develop a plan for your work or research.

Acknowledging NanoCenter and FabLab

The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.

Read how to acknowledge


The lab is currently operating under Phase 1: Limited Presence restrictions.

Current hours are:
7:00am - 5:00pm
Monday - Friday
by appointment only.

Please contact the appropriate staff to make an appointment.

FabLab Contact Information


2302 Jeong H. Kim Engineering Building


John Abrahams

Director, FabLab

Jon Hummel

Staff, FabLab

Tom Loughran

Staff, FabLab

Mark Lecates

Staff, FabLab

NanoCenter Group NanoCenter

Communicate Director: Jim O'Connor
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