Updated 6/8/2020
Please read our updates to our operations in FabLab, AIM Lab, and partner labs.
The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.
The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.
EVG620 is back in operation
The Oxford Cl2 etcher is on-line
Oxford PECVD is back on-line.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
ALD users- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the notes section of your reservation. Otherwise you will be charged for the full rates.
REMOVER PG is only too be used in the dedicated stations. Do not remove Remover PG from the beakers. $150/gal
Woollam ellipsometry system is in horizontal mode.
West Bond Ball Bonder is back in operation.
STS DRIE I down due to a water leak. Repairs pending waiting for parts.
FLUORINE ETCHER - Is back on line. All users will need to be re trained. Mark will need to know the recipe in advance so that it can be transferred and tested.
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
The lab is currently operating under Phase 2: Intermediate Presence.
Current hours are:
7:00am - 5:00pm
Monday - Friday
by appointment only.
Please contact the appropriate staff to make an appointment.
