The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.
The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.
The Main FabLab is open 24/7 with restricted after hours access between 8:00pm - 7:00am.
The Teaching Lab schedule will be posted once the current semester class schedule is completed.
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
ALD users- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the notes section of your reservation. Otherwise you will be charged for the full rates.
EVG 620 aligner is off line due to a power supply issue. An assessment is being performed and hopefully we will have some answers in January.
New Gold and Palladium Prices. Effective 11/11/2019 Gold and Palladium will increase to $82/100nm of deposition.
REMOVER PG is only too be used in the dedicated stations. Do not remove Remover PG from the beakers. $150/gal
FLUORINE ETCHER-A new chiller was installed on 2/20/20. All programs have to be updated to run the proper temps with the chiller and oxford signals. see note at tool or see Mark
Woollam ellipsometry system is in horizontal mode.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
As of July 1st, 2019 the FABLAB will charge for use of equipment that was previously been uncharged. The exception is when equipment is used as part of time reserved for a process tool. This includes- but it not limited to- Probe stations, profilometers, Raith off-line computer, microcscopes, ovens, Hall Effect, N&K, Ozone cleaner, Fusion Systems UV, etc. Remember- these are free if used as part of a charged process but you MUST make a reservation if used in a stand-alone mode.
The STS is currently off line due to a failure in the main pump. The pump is out for repair and is expected back early in March.
2302 Jeong H. Kim Engineering Building
| John Abrahams | 301-405-6664 |
| Jon Hummel | 301-405-5017 |
| Tom Loughran | 301-405-3642 |
| Mark Lecates | 301-405-5197 |
