June 17, 2024 UMD Home NanoCenter AIMLab
Maryland NanoCenter FabLab FabLab Teaching Lab

Welcome

The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.

Classes in FabLab

The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.

Click here to learn more about classes in the lab.


Announcements

Ongoing

For those using the Cl and F Oxford etchers, if you are cleaning/conditioning the chamber before your actual sample, you may remove up to 30 minutes of your reservation after your session. It is expected for the users to modify it within 8hrs of when the reservation started. Failure to do so will result in standard charge rate for those times. Staff will NOT change this after the modification window.

Ongoing

The BET system now back in operation! Due to the issues found during the repair, all samples must be prebaked at least over 100C overnight before degassing even . Any material that cannot be heated above 100C must be approved by the staff beforehand. Failure to do so will lead to the tool failure again. All sample tubes must be checked in/out. Its expected for users to take back their samples after analysis and return clean sample tubes. Contact Nam for further detail.

Ongoing

Beneq ALD TMA precursor was refilled with limited amount. More is one the way. Notify the staff if you notice low/no pulses. Once additional TMA arrives, the tool will be taken offline again for short period of time. If you notice the reactor pressure greater than 5 mbar, notify the staff immediately.

Ongoing

New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.

Ongoing

If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.

Ongoing

External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.

Using the lab

If you are interested in using the instruments in the lab please complete the steps on the Become a User page. Additionally, introduce yourself to the FabLab staff and discuss your project. This will allow us to understand your needs and develop a plan for your work or research.

Acknowledging NanoCenter and FabLab

The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.

Read how to acknowledge

Hours

Current hours are:
7:00am - 5:00pm
Monday - Friday

The Main FabLab is open 24/7 with restricted after hours access between 8:00pm - 7:00am.

FabLab Contact Information

Location

2302 Jeong H. Kim Engineering Building

Staff

Nam Kim

Director, FabLab

nsk0248@umd.edu
301-405-6664

Jon Hummel

Staff, FabLab

jhummel1@umd.edu
301-405-5017

Tom Loughran

Staff, FabLab

tcl@umd.edu
301-405-3642

Mark Lecates

Staff, FabLab

mlecates@umd.edu
301-405-5197

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