The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.
The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.
Heidelberg MLA150 is having the conversion issue intermittently. We are working with the manufacturer to get it solved permanently. For now, the tool can be used, but be aware of the risk of your process failing.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.
All gas lines have been replaced and on line with the exception of Silane. We are working on the Silane. This effects Poly dep.
External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.
The Xactix XeF2 is back online
The BET system now back in operation! Due to the issues found during the repair, all samples must be prebaked at least over 100C overnight before degassing even . Any material that cannot be heated above 100C must be approved by the staff beforehand. Failure to do so will lead to the tool failure again. All sample tubes must be checked in/out. Its expected for users to take back their samples after analysis and return clean sample tubes. Contact Nam for further detail.
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
Current hours are:
7:00am - 5:00pm
Monday - Friday
The Main FabLab is open 24/7 with restricted after hours access between 8:00pm - 7:00am.
