The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.
The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.
External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.
The Ozone generator for the ALD is not running at this time so V2O5 will only run with H2O precursor..
Micromeritics BET degas seems to be back in operation.
Micromeritics ASAP replacement pump has been installed. The system should be functioning and can now be used.
The Raith is back online. The loadlock functions slightly differently. See Jon Hummel for details.
Dicing saw "A" is back in operation but Dicing saw "B" is not working.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.
04/17/2023: Multipurpose annealing furnace has new controllers installed. Contact staff for new instructions and training.
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
Current hours are:
7:00am - 5:00pm
Monday - Friday
The Main FabLab is open 24/7 with restricted after hours access between 8:00pm - 7:00am.
