The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community as well as government and industry.
The FabLab is not only used for work and research. We have a growing number of classes utilizing this state of the art facility giving students hands on experience learning the processes and techniques used to make our electronics and devices.
The Ozone generator for the ALD is not running at this time so V2O5 will only run with H2O precursor..
Precious Metal Palladium (Pd) has increased to $100/100nm - 10-1-22
Both Dicing Saws are back in operation.
ZnO is not available in the ALD until further notice. More DEZ is on order.
Micromeritics ASAP replacement pump has been installed. The system should be functioning and can now be used.
Tystar SiO2 and Si3N4 are operational. Poly Si is not at this time.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.
The NanoCenter and FabLab need your help! Acknowledging the support given by the NanoCenter in your presentations and publications help us out tremendously.
Current hours are:
7:00am - 5:00pm
Monday - Friday
The Main FabLab is open 24/7 with restricted after hours access between 8:00pm - 7:00am.
