Beneq ALD ran out of TMA. New batch was ordered this week and should arrive soon! No more Al2O3 until it is replaced.
Gold deposition rates have increased due to the new prices in the gold market. The rate is now $300/100nm. Be advised, prices will continue to rise over time.
The Tystar LPCVD furnace is operational again for oxide, silicon nitride, and polysilicon growths.
The Denton e-beam evaporator is operational again.
New rates and target limitations are established for AJA ATC Orion 8 Sputtering system. See scheduler reservations for details.
If you run a process that has variable rates (i.e.- ALD, furnace, sputter, etc.), make sure you write in the final dollar amount in the Description of Operation section of your reservation along with the reservation ID number of the original run. Otherwise you will be charged for the full rates.
External Materials If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made. Please submit an External Materials Request form for each material you will bring. This form can be found on the Fablab equipment page.
