April 11, 2026 UMD Home NanoCenter AIM Lab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - TiNiHf, 2 - SiO2, 3 - Ti
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $240 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
Reservations
Date Start End User
04/14/2026 08:00 AM 08:15 AM Sukanya Goswami

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Apr 14, 2026
8:00 am - 8:15 am
Sukanya Goswami
View Reservation
ZnO, Ti Au
Tue, Apr 07, 2026
6:00 pm - 6:30 pm
Sheng-Wei Wang
View Reservation
SiO2
Tue, Apr 07, 2026
9:30 am - 10:15 am
Emils Gustav Jurcik
View Reservation

Deleted by: Jonathan Hummel

Al
Mon, Apr 06, 2026
2:00 pm - 6:00 pm
Sheng-Wei Wang
View Reservation
TiNiHf, Ti
Fri, Apr 03, 2026
8:00 am - 12:00 pm
Sheng-Wei Wang
View Reservation
TiNiHf, Ti
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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