July 18, 2025 UMD Home NanoCenter AIM Lab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1-Nb/Ti, 2-Al, 3-Cu
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $140 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
07/21/2025 08:00 AM 11:00 AM Douglas Scott Holmes

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Mon, Jul 21, 2025
8:00 am - 11:00 am
Douglas Scott Holmes
View Reservation
Nb/Ti, Al
Fri, Jul 18, 2025
10:30 am - 11:00 am
Zihan Sun
View Reservation
Pt, Ti 500 angstrom Pt $50
Thu, Jul 17, 2025
1:00 pm - 1:30 pm
Hongyi Sun
View Reservation
AlN
Wed, Jul 16, 2025
11:45 am - 2:15 pm
Lyanne Rivera Vazquez
View Reservation
Al2O3/Inc/ - please ensure good pump [low -6s is fine]
Tue, Jul 15, 2025
4:30 pm - 6:00 pm
Hongyi Sun
View Reservation
Cu, Al, AlN
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

NanoCenter Group NanoCenter
FabLab
AIM Lab

Communicate Director: Dr. Nam Kim
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2025
Privacy Policy
Sitemap