July 8, 2025 UMD Home NanoCenter AIM Lab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1-Inconel, 2-Al2O3, 3-Co
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $140 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
07/08/2025 10:30 AM 02:00 PM Lyanne Rivera Vazquez
07/09/2025 08:30 AM 11:30 AM Leopoldo Tapia-Aracayo
07/09/2025 11:30 AM 12:30 PM Hongyi Sun
07/09/2025 04:00 PM 05:00 PM Yi-Siou Huang
07/10/2025 10:30 AM 05:30 PM Lyanne Rivera Vazquez

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Jul 11, 2025
9:00 am - 10:00 am
Peter Snapp
View Reservation
Pt
Thu, Jul 10, 2025
10:30 am - 5:30 pm
Lyanne Rivera Vazquez
View Reservation
Ti/Al2O3/Ag
Wed, Jul 09, 2025
4:00 pm - 5:00 pm
Yi-Siou Huang
View Reservation
Si, SiO2
Wed, Jul 09, 2025
11:30 am - 12:30 pm
Hongyi Sun
View Reservation
Cu,Al
Wed, Jul 09, 2025
8:30 am - 11:30 am
Leopoldo Tapia-Aracayo
View Reservation
V
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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