DEP-01: AJA ATC 1800 Sputtering unit

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Back to Equipment List AJA ATC 1800 Sputtering unit

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Ti, 2 - TiO2, 3 - Cu
Please email Dr. Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $300 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Daniel Lewis
dlewis17@umd.edu
301-405-5018

Rates

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.

Reservations

Date	Start	End	User
07/27/2026	11:30 AM	03:30 PM	Lyanne Rivera Vazquez
07/29/2026	12:00 AM	07:00 AM	Daniel Lewis
07/29/2026	11:00 AM	02:00 PM	Peter Micciche
07/30/2026	12:00 AM	07:00 AM	Daniel Lewis
07/31/2026	12:00 AM	07:00 AM	Daniel Lewis

Please login to make a reservation.

External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs

	Mon, Aug 03, 2026 - 7:00 am Daniel Lewis View Reservation	No target changes without Dr. Kim's approval
	Fri, Jul 31, 2026 - 7:00 am Daniel Lewis View Reservation	No target changes without Dr. Kim's approval
	Thu, Jul 30, 2026 - 7:00 am Daniel Lewis View Reservation	No target changes without Dr. Kim's approval
	Wed, Jul 29, 2026 11:00 am - 2:00 pm Peter Micciche View Reservation
	Wed, Jul 29, 2026 - 7:00 am Daniel Lewis View Reservation	No target changes without Dr. Kim's approval

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)