DEP-01: AJA ATC 1800 Sputtering unit

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Back to Equipment List AJA ATC 1800 Sputtering unit

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1- Ag, 2-Al2O3, 3-Inconel
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $110 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
04/17/2025	09:30 AM	10:30 AM	Yi-Siou Huang
04/18/2025	08:30 AM	10:00 AM	Jay Easter

Please login to make a reservation.

External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs

	Fri, Apr 18, 2025 8:30 am - 10:00 am Jay Easter View Reservation	Au 10000 angstroms $$1100
	Thu, Apr 17, 2025 9:30 am - 10:30 am Yi-Siou Huang View Reservation	Ag
	Wed, Apr 16, 2025 9:45 am - 2:30 pm Lyanne Rivera Vazquez View Reservation	Al2O3/Ag/ Inconel
	Tue, Apr 15, 2025 8:00 am - 2:00 pm Lisa Hanke View Reservation	Cu, TiNiHf
	Mon, Apr 14, 2025 1:00 pm - 1:30 pm Chi Won Ahn View Reservation	Au 500 angstroms total $55

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)