June 3, 2025 UMD Home NanoCenter AIM Lab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1-Ni, 2-LiPO4, 3-Al
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $140 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
06/04/2025 02:00 PM 02:30 PM Qinqin Wang
06/06/2025 10:30 AM 01:30 PM Lyanne Rivera Vazquez

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Jun 06, 2025
10:30 am - 1:30 pm
Lyanne Rivera Vazquez
View Reservation
Al/Co/Ni
Wed, Jun 04, 2025
2:00 pm - 2:30 pm
Qinqin Wang
View Reservation
ITO
Tue, Jun 03, 2025
10:00 am - 11:30 am
Leopoldo Tapia-Aracayo
View Reservation
Li3PO4
Fri, May 30, 2025
9:15 am - 2:00 pm
Leopoldo Tapia-Aracayo
View Reservation
V
Thu, May 29, 2025
11:00 am - 2:00 pm
Jay Easter
View Reservation
Ni, Au 1000 angstroms $140.
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

NanoCenter Group NanoCenter
FabLab
AIM Lab

Communicate Director: Dr. Nam Kim
Contact the Webmaster

Links Logos
Privacy Policy
Sitemap

Copyright The University of Maryland University of Maryland
2004-2025
Privacy Policy
Sitemap