November 21, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1-Al, 2-AlN, 3-Au
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $110 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
11/21/2024 09:30 AM 10:30 AM Jay Easter
11/21/2024 11:00 AM 12:00 PM Hongyi Sun
11/21/2024 01:00 PM 02:30 PM Emils Gustav Jurcik
11/22/2024 08:00 AM 09:30 AM Amirehsan Alizadehherfati

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Nov 22, 2024
8:00 am - 9:30 am
Amirehsan Alizadehherfati
View Reservation
ITO
Thu, Nov 21, 2024
1:00 pm - 2:30 pm
Emils Gustav Jurcik
View Reservation
Al
Thu, Nov 21, 2024
11:00 am - 12:00 pm
Hongyi Sun
View Reservation
Thu, Nov 21, 2024
9:30 am - 10:30 am
Jay Easter
View Reservation
Au
Wed, Nov 20, 2024
12:00 pm - 2:30 pm
Jakob Rasmussen
View Reservation
Al2O3
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

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