| Description |
The Temescal Electron Beam Deposition System is a 4-pocket ebeam evaporator. A versatile process tool, it is configured to hold anything from small samples up to twelve 3" or eight 4" wafers at a time. Four source pockets allow multiple layer thin film depositions in a single pumpdown cycle.
This tool is primarily used for metals deposition, including chromium, gold, titanium and aluminum. |
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| Location | FabLab |
DEP Tunnel
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| Manufacturer |
Temescal BJD-1800 |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | ||||||||||||||||
| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes |
