June 17, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List MJB-3 Mask aligner- right of spin station #1
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
Location FabLab | Teaching Lab
Manufacturer Karl Suss America Inc. MJB-3
Staff Contact FabLab Staff
fablab@umd.edu
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Jun 04, 2024
10:15 am - 11:00 am
Rachit Sood
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Mon, May 13, 2024
10:30 am - 11:30 am
Rachit Sood
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Fri, May 03, 2024
11:30 am - 12:00 pm
Rachit Sood
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Mon, Apr 29, 2024
9:45 am - 11:45 am
Rachit Sood
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Thu, Apr 25, 2024
1:15 pm - 1:45 pm
Rachit Sood
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Records to show:
SOPs
Photo-03 - SOP - MJB-3 Mask Aligner.pdf (64.6 KB)
index.php (38 B)
Manuals

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Recipes

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