May 23, 2025 UMD Home NanoCenter AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, May 23, 2025
1:00 pm - 3:00 pm
Joshua Wang
View Reservation
Thu, May 22, 2025
6:15 pm - 7:45 pm
Ti Xie
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Cr/Au 5/70 nm 98$
Thu, May 22, 2025
7:00 am - 8:30 am
Yixiao Wang
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5 nm Cr+70 nm Au = $98
Wed, May 21, 2025
8:15 pm - 9:45 pm
Yixiao Wang
View Reservation
Overnight pump
Wed, May 21, 2025
10:30 am - 12:00 pm
Liuxin Gu
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Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

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