| Description |
Rates are for first 6 hours; additional hours in reservation are billed at 50%
For Ebeam Lithography with Nabity software Configuration: |
|||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Location | FabLab |
Exploratory Lab
|
|||||||||||||||
| Manufacturer |
JEOL 840/Nabity |
|||||||||||||||
| Staff Contact |
 Jonathan Hummeljhummel1@umd.edu 301 405-5017 |
|||||||||||||||
| Rates | UMD $33/hr External Non-profit / University $51/hr Small Commercial / MTECH $75/hr Large Commercial $120/hr |
|||||||||||||||
| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
|||||||||||||||
| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
|||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs |
|
|||||||||||||||
| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
||||||||||||||||
| Recipes |
