Description |
NOTE: This Bench is for developing photoresist only. Use other wet benches for any other wet processing you need to do.
Working with wet chemicals can be hazardous if you don't follow the proper procedures at all times. Violating procedure risks not only your health but also the health and safety of other users and may result in loss of access to FabLab for an extended period of time. |
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Location | FabLab | Photo Tunnel | |||||||||||||||
Manufacturer |
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Staff Contact |
FabLab Staff fablab@umd.edu |
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Rates | UMD $81/hr External Non-profit / University $126/hr Small Commercial / MTECH $166/hr Large Commercial $242/hr No Charge $0/hr |
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Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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Logs |
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SOPs |
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Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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Recipes | Photoresist ProcessesAZ4620_process.doc (25.5 KB)NPR9 process.doc (24.5 KB) NR9-1500PY.pdf (88.62 KB) SPR220_resist_process.doc (25.5 KB) baseline_shipley_1813_resist_chlorobenzene_lift.doc (28 KB) chlorobenzene_lift.doc (28.5 KB) photo_resist_pouring_procedure.doc (24 KB) shipley_1813_positive_photolithography_process.doc (27 KB) |