| Description |
The custom-built Denton Evaporator is a multi source evaporator with the following features:
4-pocket electron beam evaporation source
Handles up to 4" diameter substrates
Substrate heating to 300 C
O2 and Ar gas inlets for reactive deposition (MFC controlled)
Laser diode coating flip fixture allows multiple coating during a single pump down cycle
Precious metals surcharge(10/11): Au: $110 per 100nm Pt: $100 per 100nm, Pd: $110 per 100nm |
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| Location | FabLab |
DEP Tunnel
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| Manufacturer |
Denton |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | Large Commercial $242/hr No Charge $0/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr |
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
dep-03_denton_operating_manual.pdf (412.83 KB)
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| Recipes |
