September 21, 2023 UMD Home NanoCenter AIMLab
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 610 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 700 degrees Celsius or Pyrometer to 1000C.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact NamNam Kim
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Mon, Sep 18, 2023
12:00 pm - 12:30 pm
Daniela Fontecha
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LTP annealing
Wed, Sep 06, 2023
10:30 am - 11:00 am
Daniela Fontecha
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LTP annealing redo
Tue, Sep 05, 2023
12:30 pm - 1:00 pm
Daniela Fontecha
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LTP annealing
Thu, Aug 24, 2023
12:00 pm - 1:00 pm
Daniela Fontecha
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LTP annealing
Mon, Aug 21, 2023
2:00 pm - 2:30 pm
Daniela Fontecha
View Reservation
LTP annealing test
Records to show:
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)

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