CVD-02: RTA-610

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Description

The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:

Closed loop temperature control with thermocouple temp sensing
Precise time-temperature profiles tailored to specific processes
Rapid heating and cooling rates
Consistent sample-to-sample process cycle repeatability

AG Associates model 610 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 700 degrees Celsius or Pyrometer to 1000C.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.

Location

FabLab | CVD Tunnel

Manufacturer

AG Associated 610

Staff Contact

Nam Kim
nsk0248@umd.edu
301-405-6664

Rates

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

No Charge

$0/hr

Reservations

No upcoming reservations at this time.
Please login to make a reservation.

External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs

	Fri, May 30, 2025 10:00 am - 12:00 pm Yi-Siou Huang View Reservation
	Mon, May 19, 2025 3:30 pm - 4:00 pm Daniela Fontecha View Reservation	LTP anneal
	Tue, May 13, 2025 10:00 am - 10:30 am Kyle Martin View Reservation
	Wed, May 07, 2025 3:00 pm - 4:00 pm Daniela Fontecha View Reservation
	Tue, May 06, 2025 3:00 pm - 5:00 pm Kyle Martin View Reservation

SOPs

cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)

index.php (38 B)

Manuals

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Recipes