March 4, 2024 UMD Home NanoCenter AIMLab
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 610 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 700 degrees Celsius or Pyrometer to 1000C.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact NamNam Kim
nsk0248@umd.edu
301-405-6664
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
03/05/2024 02:00 PM 03:00 PM Amirehsan Boreiri

Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Mar 05, 2024
2:00 pm - 3:00 pm
Amirehsan Boreiri
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Mon, Feb 26, 2024
10:30 am - 11:00 am
Mitchell Gross
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Wed, Feb 14, 2024
8:00 am - 1:00 pm
Nam Kim
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Mon, Jan 29, 2024
12:00 pm - 12:30 pm
Ryan Purcell
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mon
Fri, Dec 15, 2023
10:00 am - 10:30 am
Ryan Purcell
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fri
Records to show:
SOPs
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)
Manuals

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Recipes

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