January 13, 2026 UMD Home NanoCenter AIM Lab
Back to Equipment List March O2 plasma system
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Tue, Jan 13, 2026
2:00 pm - 2:15 pm
Evan Newman
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Deleted by: Evan Newman

I will clean my first chip layer to prep it for my second layer addition
Tue, Jan 13, 2026
1:15 pm - 1:30 pm
Tahir Mahmud
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Fri, Jan 09, 2026
5:00 pm - 5:30 pm
Theodore Browning Gifford
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Fri, Jan 09, 2026
2:45 pm - 3:00 pm
Gage Sabater
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Fri, Jan 09, 2026
10:30 am - 10:45 am
Theodore Browning Gifford
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Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

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