July 22, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List Beneq Atomic Layer Deposition System
Description

The Ozone generator for the ALD has been repaired. The TMA and DEZ in the Beneq ALD has been refilled. No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($75/hour for UMD use, $116 Non- profit/University, $158- Small commercial, $220- Large commercial) followed by $35/hour after that.

Vanadium Oxides at standard rates ($75/hour for UMD- see above for other organizations) for TWO hours then $10/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.


Operation is limited to users approved and trained by FabLab staff.


TMA is out and need to be refilled. Check announcements for details

Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Link
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-5018
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Thu, Jul 18, 2024
11:30 am - 12:00 pm
George Alexander
View Reservation

Deleted by: George Alexander

ZnO coating
Tue, Jul 16, 2024
11:30 am - 12:00 pm
George Alexander
View Reservation
Thu, Jul 11, 2024
2:00 pm - 2:30 pm
Shufeng Liu
View Reservation
Al2O3
Thu, Jul 11, 2024
1:00 pm - 2:00 pm
Shufeng Liu
View Reservation
Al2O3
Wed, Jul 10, 2024
11:45 am - 12:30 pm
George Alexander
View Reservation
ZnO coating
Records to show:
SOPs
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)
Manuals

You must have reservation permissions to view the manuals. Please login to view manuals.

Recipes

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