| Description |
The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only. 30 minute minimum charge |
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| Location | FabLab |
CVD Tunnel
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| Manufacturer |
Tystar Tytan Link |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs | ||||||||||||||||
| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
Cvd-06 - Flow Diag - LPCVD Low Stress Silicon Nitride - 110636A.pdf (82.46 KB)
Cvd-06 - Flow Diag - LPCVD Polysilicon - 110639A.pdf (72.16 KB) Cvd-06 - Flow Diag - Wet Ox with TLC-Anneal - 107668A.pdf (57.43 KB) Cvd-06 - Installation Layout Tyan Furnace, L-H System - 110632A.pdf (594.62 KB) Cvd-06 - System Summary.doc (108 KB) Cvd-06 - Vacuum Manifold Layout with Remote Pump - 110626A.pdf (377.5 KB) |
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| Recipes |
