| Description |
Dedicated to pre-cleaning silicon substrates prior to CVD or furnace processing.
This wet bench is not available to FabLab users - FabLab staff only please. |
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| Location | FabLab |
CVD Tunnel
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| Manufacturer |
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| Staff Contact |
FabLab Staff fablab@umd.edu |
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| Rates | UMD $81/hr External Non-profit / University $126/hr Small Commercial / MTECH $166/hr Large Commercial $242/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes | Wet Etch Recipescolor_chart_for_SiO2_film_thickness.doc (86 KB)etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf (1.02 MB) seminconductor_processing_recipes.doc (37.5 KB) silicon_etching_and_cleaning.doc (176 KB) wet_etch_121500.pdf (13.43 KB) |
