March 29, 2024 UMD Home NanoCenter AIMLab
Back to Equipment List Profilometer Tencor Alpha Step 200- FABLAB
Description The AlphaStep 200 is used to measure thin film thicknesses of less than 100 Å up to 165 microns. It measures the deflection of a stylus as it is drawn over the sample.
Location FabLab | Main Fab Hall
Manufacturer AlphaStep 200
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
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External Materials

If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring.

Logs
Fri, Sep 11, 2020
1:00 pm - 2:00 pm
Jaesung Lee
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Wed, Dec 11, 2019
5:45 pm - 6:00 pm
Zhongjie Huang
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Tue, Dec 03, 2019
3:00 pm - 5:00 pm
Keith Gregorczyk
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Deleted by: Keith Gregorczyk

TiN Cl etch
Tue, Sep 24, 2019
5:45 pm - 6:00 pm
Zhongjie Huang
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Fri, Sep 13, 2019
1:15 pm - 1:30 pm
Zhongjie Huang
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Records to show:
SOPs
index.php (38 B)
met-07_sop_alphastep_200.pdf (172.56 KB)
Manuals

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Recipes

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