| Description |
The Parylene Deposition System Model 2010 is a vacuum system used for the
sublimation and subsequent deposition of Parylene onto a silicon wafer (or
other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch
wafer can be processed at one time. Only trained and approved users may use this machine. |
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| Location | FabLab |
Exploratory Lab
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| Manufacturer |
SCS Equipment PDS 2010 Labcoter 2 Link |
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| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
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| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
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| Reservations |
Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| SOPs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
parylene_manual.pdf (333.07 KB)
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| Recipes |
