| Description |
The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator
Precious metals surcharge(7/18): Au: $300 per 1000Å Pt: $100 per 1000Å
Pd-$110 per 1000Å |
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| Location | FabLab |
Dep Tunnel
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| Manufacturer |
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| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
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| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr Staff Technical Assistance Time is added based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services for users of the lab. Click here for full rate details.
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| Reservations |
Please login to make a reservation. |
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| External Materials |
If you plan to bring external materials into the lab, please notify the FabLab staff to ensure proper safety protocols and any equipment arrangements can be made ahead of your reservation. Please submit an External Materials Request form for each material you will bring. |
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| Logs |
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| Manuals
You must have reservation permissions to view the manuals. Please login to view manuals. |
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| Recipes |
