May 26, 2022 UMD Home FabLab AIMLab
EVG 620 Mask Aligner Back to Equipment List
Operational Status ‚óŹ Online
Description EVG- 620 is back in operation with a NEW power supply, new "Y" motion motor and PM. Note: bulb changed 11-11-2020 Intensity is now 24 mw/cm2

Do NOT turn off after use, use SO use the new track ball and left button


The EVG 620 is a two-sided contact alignment and exposure tool. It is configured for 3", 4" and 6" wafers only. Its minimum achievable feature size is approximately one micron.


The EVG 620 is fitted with a special fixture which facilitates precise registration of two wafers in the aligner prior to using the EVG 01 Wafer Bonder.

Power supply
Location FabLab | Photo Tunnel
Manufacturer EVG 620
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Fri, May 13, 2022
12:30 pm - 12:45 pm
Deric Session
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Fri, May 13, 2022
11:15 am - 11:30 am
Deric Session
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Deleted by: Deric Session

Tue, May 03, 2022
12:30 pm - 1:30 pm
John Abrahams
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Fri, Apr 01, 2022
10:00 am - 10:30 am
Stefan Theodoru
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Thu, Mar 31, 2022
9:00 am - 9:30 am
Haotian Wang
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Deleted by: John Abrahams

Training on EVG for 3" wafer
Records to show:
SOPs
620Bondalign.pdf (1.01 MB)
620Lithography.pdf (995.56 KB)
index.php (38 B)
photo-05_sop_EVG620_mask_aligner.pdf (86.36 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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