NanoCenter Facility Rates Effective January 1, 2024

Tool	Internal	External University/Government	Small Commercial	Large Commercial
FabLab
Process Tools	81	126	166	242
Raith E-Beam	47	73	103	182
Hitachi SEM	27	42	63	133
Porosimeter (analysis tools)	20	31	51	74
Backside Tools	28	44	64	150
Inspection	43	67	97	176
Staff Technical Assistance Time 1	40	62	66	79
AIM Lab Tools
Hitachi SU-70 FEG SEM	52	81	132	182
JEM 2100 LaB6 TEM	47	73	132	182
JEM 2100 FEG TEM/STEM	66	103	198	273
JXA 8900R Microprobe	35	55	132	182
Tescan GAIA/XEIA FEG SEM	52	81	132	182
Tescan GAIA/XEIA FIB/SEM	102	159	198	273
Staff Technical Assistance Time 1	40	62	66	79
Holders and Sample Prep	28	44	55	80

NanoCenter Facility Rates Effective October 1, 2026

Tool	Internal	External University/Government	Small Commercial	Large Commercial
Process Tools	85	132	174	252
Raith E-Beam1	50	78	110	194
Hitachi SEM	30	47	70	148
New Oxford	98	153	202	293
Analysis Tools	22	34	56	81
Backside Tools	32	50	73	171
Process Support Tools	11	13	17	28
Inspection	45	70	102	184
Staff Technical Assistance Time 2	40	62	67	79
AIM Lab Tools
Hitachi SU-70 FEG SEM	60	93	152	210
JEM 2100 LaB6 TEM	60	93	169	232
JEM 2100 FEG TEM/STEM	80	125	240	331
JXA 8900R Microprobe	42	66	158	218
Tescan GAIA/XEIA FEG SEM	60	93	152	210
Tescan GAIA/XEIA FIB/SEM	115	179	223	308
JEOL Neoarm AC-TEM	130	203	390	537
Staff Technical Assistance Time 1	50	78	83	99
Holders and Sample Prep	35	55	69	100

All rates in are in $/hour.

Rates are determined by the type of organization from which the funds are paid.

(1) Rate for Staff Technical Assistance Time is based on the time spent by staff members providing technical support, guidance & training outside of equipment training, and technical services to users of the lab.

Last modified: August 17, 2026 10:32 pm