July 26, 2024 UMD Home FabLab AIMLab

NanoCenter Shared Equipment

3D Printing
Name Location Contact Operational Status
Envision One cDLM 3D Printer
Fisher-Lab● Online
Objet30 Pro
RoboticsLab● Online
uPrint SE Plus
RoboticsLab● Online
PRUSA I3 MK3S
RoboticsLab● Online
BioAssemblyBot 400 3D Bioprinter
Fisher-Lab● Online
UpNano NanoOne 1000 2PP 3D Printer
BAM Lab● Online
3-D Printer
Fisher-LabShannon McLoughlin● Offline
Annealing
Name Location Contact Operational Status
Annealing Furnace, Multipurpose
FabLabThomas Loughran● Online
Backside
Name Location Contact Operational Status
Roland MDX-540 Mill
RoboticsLab● Online
Universal VLS3.50 Laser Cutter
RoboticsLab● Online
Westbond 7476E Wirebonder
RoboticsLab● Online
Glove Box -N2
FabLab● Online
Wire Bonder- K&S- Wedge type
FabLab● Offline
Wire Bonder- K&S- Ball type
FabLab● Offline
Glove Box - ANSLab
ANSLabAlexander Kozen● Online
Tergeo Plasma Cleaner from PIE Scientific
BAM Lab● Online
SPECIAL: coin cell battery with ALD-protected electrode
ANSLab● Online
Dicing Saw B - Microautomation
FabLabJohn Abrahams● Waiting for part/service
Glove Box - Exploratory Lab
FabLabMark Lecates● Online
Wire Bonder - FABLAB West Bond 7KE
FabLabJohn Abrahams● Online
Dicing Saw A - Microautomation
FabLabJohn Abrahams● Online
Deposition
Name Location Contact Operational Status
III-V MOCVD
UMBC● Online
Oxford PECVD-Cobra
FabLab● Online
Ultratech Fiji 200 ALD system Mario
ANSLab● Waiting for part/service
Ultratech Fiji 200 ALD system Luigi
ANSLab● Online
In-situ sensing in Fiji ALD systems (Mario, Luigi)
ANSLab● Online
RTA-610
FabLabNam Kim● Online
Beneq Atomic Layer Deposition System
FabLabJohn Abrahams● Online
LP-CVD Furnace
FabLabThomas Loughran● Online
Tystar CVD
FabLabThomas Loughran● Online
Oxford PECVD
FabLabThomas Loughran● Online
AJA ATC 1800 Sputtering unit
FabLabJonathan Hummel● Online
Metra Thermal Evaporator
FabLabThomas Loughran● Online
Denton Ebeam/thermal evaporator
FabLabThomas Loughran● Offline
Parylene Coater
FabLabMark Lecates● Online
Angstrom NexDep Ebeam evaporator
FabLabMark Lecates● Online
Angstrom Ebeam Evaporator PLC Driven -B
FabLabMark Lecates● Online
AJA ATC Orion 8 Sputtering system
FabLabJonathan Hummel● Online
III-V MOCVD Material Growth
UMBCFow-Sen Choa● Online
Etching
Name Location Contact Operational Status
Etch tunnel Acid Bench 1
FabLabFabLab Staff● Online
Etch tunnel Acid Bench 2
FabLabFabLab Staff● Offline
Etch tunnel Caustic/Base Bench
FabLabFabLab Staff● Online
Etch tunnel Solvent Bench
FabLabFabLab Staff● Online
Trion RIE
FabLabMark Lecates● Online
Oxford ICP Etcher(Chlorine)
FabLabThomas Loughran● Online
Teaching Lab Acid Wet Bench
FabLabFabLab Staff● Online
Teaching Lab Caustic/Solvent Wet Bench
FabLabFabLab Staff● Online
Sample Preb Wet Bench
FabLabMark Lecates● Online
Furnace Preclean Web Bench
FabLabFabLab Staff● Online
Critical Point Dryer
FabLabJonathan Hummel● Online
Oxford Etcher (Fluorine)
FabLabMark Lecates● Online
XactiX Xenon Difluoride Etcher
FabLabJonathan Hummel● Online
Exploratory Lab Wet Bench
FabLabFabLab Staff● Online
Lithography
Name Location Contact Operational Status
Raith e_LiNE
FabLabJonathan Hummel● Online
MJB-3 Mask aligner- right of spin station #1
FabLabFabLab Staff● Online
EVG 620 Mask Aligner
FabLabJohn Abrahams● In maintenance
Photoresist Spin Station- Left- FABLAB-PWM32-Programable
FabLabFabLab Staff● Online
Photoresist Spin Station- Teaching Lab- 3
FabLabFabLab Staff● Online
Developing Bench
FabLabFabLab Staff● Online
March O2 plasma system
FabLabMark Lecates● Online
Polymer Spin Station
FabLabFabLab Staff● Online
Raith off line computer
FabLabJonathan Hummel● Online
Photoresist Spin Station- Right- FABLAB-PWM32-Programable
FabLabFabLab Staff● Online
Spin Station- Laurell- SU-8 ONLY
FabLabFabLab Staff● Online
MA-4 Suss Mask Aligner
FabLabMark Lecates● Online
MJB-3 Mask Aligner- Left of spin station #2
FabLabFabLab Staff● Online
FABLAB Photo oven (Blue M)
FabLabFabLab Staff● Online
Heidelberg MLA150 Maskless Aligner
FabLabNam Kim● Online
Metrology
Name Location Contact Operational Status
Q Exactive plus high resolution mass spectrometer
NanoMass● Online
Fractionator
NanoMass● Online
Inverted Research Grade Microscope
NanoMass● Online
Stereo Research Grade Microscope
NanoMass● Online
CESI System
NanoMass● Online
Spectrophotometer
NanoMass● Online
Profilm 3D
FabLab● Online
Horiba Raman
ANSLabAlexander Kozen● Online
Hitachi TM4000Plus Table-Top SEM
BAM Lab● Online
ZEISS Axio Observer Z1 Inverted Microscope
BAM Lab● Online
JEM 2100 FEG TEM/STEM
AIM LabWen-An Chiou● Online
JXA 8900R Microprobe
AIM LabPhilip Piccoli● Online
JEM 2100 LaB6 TEM
AIM LabWen-An Chiou● Online
Hitachi SU-70 FEG SEM
AIM LabWen-An Chiou● Online
Tescan GAIA FEG SEM
AIM LabJiancun Rao● Online
Tescan GAIA FIB/SEM
AIM LabJiancun Rao● Online
Tescan XEIA FEG SEM
AIM LabJiancun Rao● Online
Tescan XEIA Plasma FIB/SEM
AIM LabJiancun Rao● Online
Kratos UHV surface analysis system
ANSLab● Online
ICPE-9000 ICP Atomic Emission Spectrometer
EnvEngLabMarya Anderson● Online
TA Instruments DSC Q100
FMLPatricia Gonzales● Online
TA Instruments DMA Q800
FMLRobert Morris● Online
Waters GPC
FMLSahana Bhattacharyya● Waiting for part/service
Ultramicrotome: Leica EM UC6
FMLKyle Ludwig● Online
UV/Vis Spectrophotometer
FMLRebecca Fedderwitz● In maintenance
Microbalance: Sartorius ME-5
FMLRobert Morris● Online
Hitachi S-3400 Variable Pressure SEM
FabLabJonathan Hummel● Online
Stress Measurement Tool
FabLabThomas Loughran● Online
N&K Spectrophotometer
FabLabJohn Abrahams● Online
Microscope 5- FABLAB Front Hall
FabLab● Online
Microscope 1- Leitz Ergolux in Teaching Lab
FabLabFabLab Staff● Online
Profilometer Tencor Alpha Step 200- Teaching Lab
FabLabMark Lecates● Online
Microscope 4- Leitz in FABLAB Photo Tunnel
FabLabFabLab Staff● Online
Microscope 2- Nikon Optophot in Teaching Lab
FabLabFabLab Staff● Online
Microscope 3- Zeiss in FABLAB Deposition Tunnel.
FabLabFabLab Staff● Online
Probe Station I- with 4155C
FabLabJohn Abrahams● Online
Hall Effect Measurement System
FabLabJohn Abrahams● Online
Solar Cell Simulator
FabLabJohn Abrahams● Online
Micromeritics ASAP 2020 Porosimeter Test Station
FabLabNam Kim● Online
Micromeritics ASAP 2020 Porosimeter Degas #1
FabLabJohn Abrahams● Online
Micromeritics ASAP 2020 Porosimeter Degas #2
FabLabNam Kim● Online
Arbin BT2000 Battery Test Station
FabLab● In maintenance
Profilometer P-1 Long Scan Profiler
FabLabMark Lecates● Online
Woollam Spectroscopic Ellipsometer
FabLabJohn Abrahams● Online
SHIMADZU IR Prestige21 FTIR Spectrometer
FabLabJohn Abrahams● Online
Four Point Resistivity Station
FabLabJohn Abrahams● Online
Microanalytical High-Resolution Time-of-Flight Mass Spectrometer System
NanoMass● Online
Microanalytical Ultrahigh-Resolution Orbitrap Mass Spectrometer System
NanoMass● Online
H-J-Y Raman Microscope (Chemistry)
SACKaren Gaskell● Online
AFM - Asylum MFP3D (Chemistry)
SACKaren Gaskell● Online
AFM - Cypher ES
SACKaren Gaskell● Online
Y_Data Analysis Computer -AFM
SACKaren Gaskell● Online
XPS Kratos Axis Supra+(also UPS/ AES / SAM / REELS / ISS)
SACKaren Gaskell● Online
XPS - Kratos Axis 165
SACKaren Gaskell● Online

Facilities Links

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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