November 29, 2020 UMD Home FabLab AIMLab
Annealing
Name Location Contact Operational Status
Annealing Furnace, Multipurpose
FabLabThomas Loughran● Online
Backside
Name Location Contact Operational Status
SPECIAL: coin cell battery with ALD-protected electrode
ANSLab● Online
Dicing Saw A - Microautomation
FabLabJohn Abrahams● Online
Dicing Saw B - Microautomation
FabLabJohn Abrahams● Online
Glove Box - Exploratory Lab
FabLabMark Lecates● Online
3-D Printer
Fisher-LabAnthony Melchiorri● Online
Wire Bonder - West Bond
FabLabJohn Abrahams● Online
Glove box for Li-ion batteries,Wang lab
CSWangLab● Online
Deposition
Name Location Contact Operational Status
Ultratech Fiji 200 ALD system Mario
ANSLab● Online
Ultratech Fiji 200 ALD system Luigi
ANSLab● Online
In-situ sensing in Fiji ALD systems (Mario, Luigi)
ANSLab● Online
RTA-610
FabLabJohn Abrahams● Online
Atomic Layer Deposition System
FabLabJohn Abrahams● Online
Nanowire Growth System
FabLabThomas Loughran● Online
Tystar CVD
FabLabThomas Loughran● Online
Oxford PECVD
FabLabThomas Loughran● Offline
AJA ATC 1800 Sputtering unit
FabLabJonathan Hummel● Online
Metra Thermal Evaporator
FabLabThomas Loughran● Online
Denton Ebeam/thermal evaporator
FabLabThomas Loughran● Online
Denton DV-502A carbon evaporator
FabLabJonathan Hummel● Online
Parylene Coater
FabLabMark Lecates● Online
Angstrom NexDep Ebeam evaporator
FabLabMark Lecates● Online
Angstrom Ebeam Evaporator PLC Driven -B
FabLabMark Lecates● Online
AJA ATC Orion 8 Sputtering system
FabLabJonathan Hummel● Online
III-V MOCVD Material Growth
UMBCFow-Sen Choa● Online
Etching
Name Location Contact Operational Status
Etch tunnel Acid Bench 1
FabLabFabLab Staff● Online
Etch tunnel Acid Bench 2
FabLabFabLab Staff● Online
Etch tunnel Caustic/Base Bench
FabLabFabLab Staff● Online
Etch tunnel Solvent Bench
FabLabFabLab Staff● Online
Trion RIE
FabLabMark Lecates● Online
Oxford ICP Etcher(Chlorine)
FabLabThomas Loughran● Online
STS Etcher
FabLabJonathan Hummel● Online
Teaching Lab Acid Wet Bench
FabLabFabLab Staff● Online
Teaching Lab Caustic/Solvent Wet Bench
FabLabFabLab Staff● Online
Sample Preb Wet Bench
FabLabMark Lecates● Online
Furnace Preclean Web Bench
FabLabFabLab Staff● Online
Critical Point Dryer
FabLabJonathan Hummel● Online
Oxford Etcher (Fluorine)
FabLabMark Lecates● Online
XactiX Xenon Difluoride Etcher
FabLabJonathan Hummel● Online
Exploratory Lab Wet Bench
FabLabFabLab Staff● Online
Lithography
Name Location Contact Operational Status
Raith e_LiNE
FabLabJonathan Hummel● Online
MJB-3 Mask aligner- right of spin station #1
FabLabJohn Abrahams● Online
MJB-3 Mask dual side aligner Fab Lab #3
FabLabThomas Loughran● Online
EVG 620 Mask Aligner
FabLabJohn Abrahams● Waiting for part/service
EVG 501 Bonder
FabLabJonathan Hummel● Online
Oriel Area UV Exposure System
FabLabFabLab Staff● Online
Photoresist Spin Station- Left- FABLAB-PWM32-Programable
FabLabJohn Abrahams● Online
Photoresist Spin Station- Teaching Lab- 3
FabLabJohn Abrahams● Online
Developing Bench
FabLabFabLab Staff● Online
Polymer Spin Station
FabLabThomas Loughran● Online
Raith off line computer
FabLabJonathan Hummel● Online
Branson Barrel Resist Stripper
FabLabMark Lecates● Online
Photoresist Spin Station- Right- FABLAB-PWM32-Programable
FabLabJohn Abrahams● Online
Spin Station- Laurell- SU-8 ONLY
FabLabJohn Abrahams● Online
MA-4 Suss Mask Aligner
FabLabJohn Abrahams● Online
MJB-3 Mask Aligner- Left of spin station #2
FabLabFabLab Staff● Online
FABLAB Photo oven
FabLabFabLab Staff● Online
Metrology
Name Location Contact Operational Status
JEM 2100 FEG TEM/STEM
AIM LabSz-Chian Liou● Online
JXA 8900R Microprobe
AIM LabPhilip Piccoli● Online
JEM 2100 LaB6 TEM
AIM LabSz-Chian Liou● Online
Hitachi SU-70 FEG SEM
AIM LabSz-Chian Liou● Online
Tescan GAIA FEG SEM
AIM LabWen-An Chiou● Online
Tescan GAIA FIB/SEM
AIM LabWen-An Chiou● Online
Tescan XEIA FEG SEM
AIM LabWen-An Chiou● Online
Tescan XEIA Plasma FIB/SEM
AIM LabWen-An Chiou● Online
Kratos UHV surface analysis system
ANSLab● Online
ICPE-9000 ICP Atomic Emission Spectrometer
EnvEngLabMarya Anderson● Online
TA Instruments DSC Q100
FMLMetecan Erdi● Online
TA Instruments DMA Q800
FMLMetecan Erdi● Online
Waters GPC
FMLMetecan Erdi● Online
Ultramicrotome: Leica EM UC6
FMLMetecan Erdi● Online
UV/Vis Spectrophotometer
FMLMetecan Erdi● Online
Microbalance: Sartorius ME-5
FMLMetecan Erdi● Online
Hitachi S-3400 Variable Pressure SEM
FabLabJonathan Hummel● Online
Stress Measurement Tool
FabLabThomas Loughran● Online
N&K Spectrophotometer
FabLabJohn Abrahams● Online
Microscope 1- Leitz Ergolux in Teaching Lab
FabLabFabLab Staff● Online
Profilometer Tencor Alpha Step 200- FABLAB
FabLabMark Lecates● Online
Profilometer Tencor Alpha Step 200- Teaching Lab
FabLabMark Lecates● Online
Microscope 4- Leitz in FABLAB Photo Tunnel
FabLabFabLab Staff● Online
Microscope 2- Nikon Optophot in Teaching Lab
FabLabFabLab Staff● Online
Microscope 3- Zeiss in FABLAB Deposition Tunnel.
FabLabFabLab Staff● Online
Probe Station I- with 4155C
FabLabJohn Abrahams● Online
Hall Effect Measurement System
FabLabJohn Abrahams● Online
Solar Cell Simulator
FabLabJohn Abrahams● Online
Micromeritics ASAP 2020 Porosimeter Test Station
FabLabJohn Abrahams● Online
Micromeritics ASAP 2020 Porosimeter Degas #1
FabLabJohn Abrahams● Online
Micromeritics ASAP 2020 Porosimeter Degas #2
FabLabJohn Abrahams● Online
Arbin BT2000 Battery Test Station
FabLab● Online
Profilometer P-1 Long Scan Profiler
FabLabMark Lecates● Online
Woollam Spectroscopic Ellipsometer
FabLabJohn Abrahams● Online
H-J-Y Raman Microscope
FabLabFabLab Staff● Online
SHIMADZU IR Prestige21 FTIR Spectrometer
FabLabJohn Abrahams● Online
Four Point Resistivity Station
FabLabJohn Abrahams● Online
UV/Vis/NIR Spectrophotometer
NanoChemLabZhiwei Peng● Online
Lamda 1050 + 150 mm integrating sphere
NanoChemLabZhiwei Peng● Online
Microanalytical High-Resolution Time-of-Flight Mass Spectrometer System
NanoMass● Online
Microanalytical Ultrahigh-Resolution Orbitrap Mass Spectrometer System
NanoMass● Online
H-J-Y Raman Microscope (Chemistry)
SACKaren Gaskell● Online
AFM -DI Nanoscope III multimode (Chemistry)
SACKaren Gaskell● Online

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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