May 26, 2022 UMD Home FabLab AIMLab
MJB-3 Mask aligner- right of spin station #1 Back to Equipment List
Operational Status ‚óŹ Online
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below.
Location FabLab | Teaching Lab
Manufacturer Karl Suss America Inc. MJB-3
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, May 26, 2022
9:00 am - 9:30 am
Haotian Wang
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Wed, May 25, 2022
1:00 pm - 1:30 pm
Haotian Wang
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Thu, May 19, 2022
12:45 pm - 1:15 pm
Heshan Yu
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Wed, May 18, 2022
2:30 pm - 3:00 pm
Heshan Yu
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Wed, May 18, 2022
11:15 am - 11:45 am
Mitchell Gross
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Records to show:
SOPs
Photo-03 - SOP - MJB-3 Mask Aligner.pdf (64.6 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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