September 25, 2017 UMD Home FabLab AIMLab
Back to Equipment List MJB-3 Mask dual side aligner Fab Lab
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below. A backside alignment option is available, allowing the registration of front side to backside masks, for creating three-dimensional structures.
Location FabLab | Photo Tunnel
Manufacturer Karl Suss America Inc. MJB-3 w/ Backside
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Lithography Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
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Mon, Jul 24, 2017
4:00 pm - 5:00 pm
Yiwen Hu
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Wed, Jun 14, 2017
10:45 am - 11:00 am
David Shahin
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Mon, Jun 12, 2017
9:45 am - 11:00 am
Jonathan Vannucci
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Thu, May 18, 2017
2:00 pm - 3:00 pm
Lisa Krayer
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Thu, Mar 09, 2017
5:00 pm - 5:15 pm
Bathiya Senevirathna
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Records to show:
SOPs
Photo-04 - SOP - MJB-3 Mask Aligner.pdf (1.18 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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