June 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List MJB-3 Mask dual side aligner Fab Lab
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below. A backside alignment option is available, allowing the registration of front side to backside masks, for creating three-dimensional structures.
Location FabLab | Photo Tunnel
Manufacturer Karl Suss America Inc. MJB-3 w/ Backside
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Mon, Mar 12, 2018
4:45 pm - 5:00 pm
David Shahin
View Reservation
Wed, Mar 07, 2018
1:00 pm - 1:30 pm
David Shahin
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Wed, Mar 07, 2018
11:45 am - 12:00 pm
David Shahin
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Tue, Mar 06, 2018
5:45 pm - 6:45 pm
David Shahin
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Tue, Mar 06, 2018
9:15 am - 9:45 am
David Shahin
View Reservation
Records to show:
SOPs
Photo-04 - SOP - MJB-3 Mask Aligner.pdf (1.18 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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