March 23, 2023 UMD Home FabLab AIMLab
Raith off line computer Back to Equipment List
Operational Status ● Online

The RAITH eLine Direct Write Ebeam System is FabLab’s primary choice for ultra high resolution patterning, while handling up to 4 inch wafers. For complex applications using masks and wafers, there are sophisticated options like height sensing and leveling, which keep the sample in focus even over these large travel ranges, and field stitching for large area patterns. The ultimate linewidth resolution of this tool is less than 20 nm.

The Raith Offline Computer is available for users to edit their write routines without tying up the Raith eLine system.

There is no charge for Raith e_Line users for using this computer in conjunction with the e_Line system. Others using the offline computer for designs for other tools will be charged for use of this computer.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
301 405-5017
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Wed, Mar 22, 2023
10:45 am - 12:45 pm
Daniel Lewis
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Fri, Mar 17, 2023
6:30 pm - 8:30 pm
Ziyi Wang
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Deleted by: Ziyi Wang

Mon, Feb 06, 2023
2:15 pm - 3:15 pm
Daniel Lewis
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Mon, Feb 06, 2023
10:00 am - 12:00 pm
Daniel Lewis
View Reservation
Wed, Feb 01, 2023
10:30 am - 12:30 pm
Daniel Lewis
View Reservation
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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