March 29, 2024 UMD Home FabLab AIMLab
Raith off line computer Back to Equipment List
Operational Status ● Online
Description

The RAITH eLine Direct Write Ebeam System is FabLab’s primary choice for ultra high resolution patterning, while handling up to 4 inch wafers. For complex applications using masks and wafers, there are sophisticated options like height sensing and leveling, which keep the sample in focus even over these large travel ranges, and field stitching for large area patterns. The ultimate linewidth resolution of this tool is less than 20 nm.

The Raith Offline Computer is available for users to edit their write routines without tying up the Raith eLine system.

There is no charge for Raith e_Line users for using this computer in conjunction with the e_Line system. Others using the offline computer for designs for other tools will be charged for use of this computer.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$10/hr
External Non-profit / University
$12/hr
Small Commercial / MTECH
$15/hr
Large Commercial
$25/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Nov 17, 2023
9:30 am - 11:00 am
Poulab Chakrabarti
View Reservation

Deleted by: Jonathan Hummel

Fri, Nov 10, 2023
12:45 pm - 1:15 pm
Robert Newby
View Reservation
Set up designs for ebeam write on Raith
Thu, Nov 09, 2023
7:00 pm - 7:30 pm
Ziyi Wang
View Reservation

Deleted by: Jonathan Hummel

Thu, Oct 12, 2023
12:00 pm - 1:00 pm
Daniel Lewis
View Reservation
Thu, Sep 07, 2023
10:00 am - 11:00 am
Daniel Lewis
View Reservation
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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