January 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List Raith off line computer
Description

The RAITH eLine Direct Write Ebeam System is FabLab’s primary choice for ultra high resolution patterning, while handling up to 4 inch wafers. For complex applications using masks and wafers, there are sophisticated options like height sensing and leveling, which keep the sample in focus even over these large travel ranges, and field stitching for large area patterns. The ultimate linewidth resolution of this tool is less than 20 nm.

The Raith Offline Computer is available for users to edit their write routines without tying up the Raith eLine system.

There is not charge for using this computer, however there is a charge for getting an account and basic training on this computer. This is same rate as using the e_line.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$0/hr
External Non-profit / University
$0/hr
Small Commercial / MTECH
$0/hr
Large Commercial
$0/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Tue, Jan 16, 2018
11:45 am - 12:00 pm
Zackery Benson
View Reservation
Mon, Jan 15, 2018
9:00 am - 10:30 am
Zackery Benson
View Reservation

Deleted by: Zackery Benson

Thu, Jan 11, 2018
9:45 am - 10:30 am
Zackery Benson
View Reservation
Tue, Jan 09, 2018
2:00 pm - 3:30 pm
Yang Zhang
View Reservation
Tue, Jan 09, 2018
10:30 am - 12:00 pm
Zackery Benson
View Reservation
Records to show:
SOPs
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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