May 26, 2022 UMD Home FabLab AIMLab
Operational Status ‚óŹ In maintenance
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 410 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 800 degrees Celsius or Pyrometer does NOT work so no runs above 800.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Mar 08, 2022
1:00 pm - 2:00 pm
Liuxin Gu
View Reservation
Training on RTA for anneal
Thu, Feb 17, 2022
10:00 am - 10:15 am
John Hoerauf
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Training John Hoerauf
Thu, Jan 27, 2022
11:30 am - 12:30 pm
Mitchell Gross
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Tue, Jan 25, 2022
12:15 pm - 12:30 pm
Mitchell Gross
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Fri, Jan 21, 2022
10:30 am - 10:45 am
Mitchell Gross
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Records to show:
SOPs
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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