March 26, 2025 UMD Home FabLab AIMLab
Operational Status ● Online
Description The HEATPULSE 610 is a rapid thermal Annealing system which use high intensity visible radiation to heat single substrates for short periods at precisely controlled temperatures.
Key features include:
  • Closed loop temperature control with thermocouple temp sensing
  • Precise time-temperature profiles tailored to specific processes
  • Rapid heating and cooling rates
  • Consistent sample-to-sample process cycle repeatability
AG Associates model 610 Rapid Thermal Annealer used for annealing samples up to 6" using Thermocouple to 700 degrees Celsius or Pyrometer to 1000C.
Always check with FABLAB staff before use.
This system is for CLEAN Silicon only.
Clean means no metals and no organics.
Location FabLab | CVD Tunnel
Manufacturer AG Associated 610
Staff Contact NamNam Kim
nsk0248@umd.edu
301-405-6664
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Mar 25, 2025
2:30 pm - 3:00 pm
Daniela Fontecha
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Tue, Mar 25, 2025
12:30 pm - 1:00 pm
Daniela Fontecha
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Fri, Mar 21, 2025
11:30 am - 12:00 pm
Daniela Fontecha
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Fri, Mar 14, 2025
4:00 pm - 4:15 pm
Daniela Fontecha
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troubleshooting
Thu, Mar 13, 2025
3:00 pm - 3:30 pm
Daniela Fontecha
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trouble shooting
Records to show:
SOPs
cvd-02_SOP_Rapid_Thermal_Annealer_610.pdf (510.35 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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