March 23, 2023 UMD Home FabLab AIMLab
Beneq Atomic Layer Deposition System Back to Equipment List
Operational Status ‚óŹ Online
Description

The Ozone generator for the ALD is not running at this time so V2O5 will not run. The DEZ in the Beneq ALD has been refilled. No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($75/hour for UMD use, $116 Non- profit/University, $158- Small commercial, $220- Large commercial) followed by $35/hour after that.

Vanadium Oxides at standard rates ($75/hour for UMD- see above for other organizations) for TWO hours then $10/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.


Operation is limited to users approved and trained by FabLab staff.

Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Link
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-5018
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Mar 22, 2023
3:00 pm - 3:15 pm
Liuxin Gu
View Reservation
Al2O3@110C
Tue, Mar 21, 2023
9:30 pm - 10:30 pm
Shufeng Liu
View Reservation
Tue, Mar 21, 2023
2:15 pm - 2:45 pm
Liuxin Gu
View Reservation
Alo@110C
Fri, Mar 17, 2023
12:00 pm - 1:30 pm
Prem Jaschin
View Reservation

Deleted by: Prem Jaschin

ZnO at 150 C
Thu, Mar 09, 2023
12:30 pm - 12:45 pm
Hongyi Sun
View Reservation
Records to show:
SOPs
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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