March 26, 2025 UMD Home FabLab AIMLab
Beneq Atomic Layer Deposition System Back to Equipment List
Operational Status ● Online
Description

The Ozone generator for the ALD has been repaired. The TMA and DEZ in the Beneq ALD has been refilled. No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($81/hour for UMD use, $126 Non- profit/University, $166- Small commercial, $242- Large commercial) followed by $36/hour after that.

Vanadium Oxides at standard rates ($81/hour for UMD- see above for other organizations) for TWO hours then $11/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.


Operation is limited to users approved and trained by FabLab staff.


Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Link
Staff Contact NamNam Kim
nsk0248@umd.edu
301-405-6664
Rates
UMD
$81/hr
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
Reservations
Date Start End User
03/27/2025 10:30 AM 05:00 PM Samuel Kim
03/28/2025 10:00 AM 02:00 PM Zihan Sun
Logs
Wed, Apr 09, 2025
10:00 am - 5:00 pm
Samuel Kim
View Reservation

Deleted by: Samuel Kim

V2O5
Fri, Mar 28, 2025
10:00 am - 2:00 pm
Zihan Sun
View Reservation
V2O5
Thu, Mar 27, 2025
10:30 am - 5:00 pm
Samuel Kim
View Reservation
V2O5
Wed, Mar 26, 2025
9:00 am - 5:00 pm
Nam Kim
View Reservation

Deleted by: Nam Kim

leak check
Tue, Mar 25, 2025
1:00 pm - 2:00 pm
Utku Noyan
View Reservation
Al2O3 100C dep
Records to show:
SOPs
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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