May 26, 2022 UMD Home FabLab AIMLab
Atomic Layer Deposition System Back to Equipment List
Operational Status ‚óŹ Online
Description

The TMA in the Beneq ALD has been refilled. No low temperature depositions and/or long exposure to precursors without explicit permission Do NOT open door to cool off system quickly. You need to tell FABLAB Staff to turn the temperature down 24 hours BEFORE you want to run.

Aluminum, Zinc and Titanium Oxide runs will be charged at rates of the first four hours standard rates ($75/hour for UMD use, $116 Non- profit/University, $158- Small commercial, $220- Large commercial) followed by $35/hour after that.

Vanadium Oxides at standard rates ($75/hour for UMD- see above for other organizations) for TWO hours then $10/hour for the remaining.

The Beneq Atomic Layer Deposition system in FabLab is currently configured for Aluminum Oxide, Titanium Oxide, Vanadium Oxide, Titanium Nitride and Zinc Oxide deposition.

*** ATTENTION- please put the type of precursor you are using in the notes when making reservations- i.e., Al2O3, V2O5 etc. ****

Warning: This system uses flammable materials such as Tri-Methyl Aluminum and DiEthyl Zinc which are highly pyrophoric.


Operation is limited to users approved and trained by FabLab staff.

Location FabLab | CVD Tunnel
Manufacturer Beneq TFS 500 ALD
Link
Staff Contact JohnJohn Abrahams
jabrah@umd.edu
301-405-6664
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, May 26, 2022
9:15 am - 10:15 am
Liuxin Gu
View Reservation
Al2O3@100C
Wed, May 25, 2022
9:00 am - 10:00 am
Haotian Wang
View Reservation
Al2O3 deposition
Tue, May 24, 2022
5:30 pm - 7:00 pm
Gillian Boyce
View Reservation
Al2O3 at 150C
Sun, May 22, 2022
12:45 pm - 1:15 pm
Changmin Shi
View Reservation
Fri, May 20, 2022
10:00 am - 10:30 am
John Abrahams
View Reservation
Determination of TMA level
Records to show:
SOPs
cvd-03_TFS_500_ALD_System_overview.pdf (1.02 MB)
cvd-03_tfs_500_tech_sheet.pdf (183.77 KB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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