May 31, 2023 UMD Home FabLab AIMLab
Critical Point Dryer Back to Equipment List
Operational Status ‚óŹ Online
Description

The Supercritical Point Dryer anti-stiction release system increases both yield and uniformity of MEMS devices. Carbon dioxide is used as the transitional dry release fluid following wet etching steps. Auto-Process up to 5 - 4" wafers in less than 1 hour.

Location FabLab | ETCH Tunnel
Manufacturer
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, May 30, 2023
12:00 pm - 1:00 pm
Mohammad Habibur Rahaman
View Reservation
Thu, May 25, 2023
11:00 am - 12:00 pm
Mohammad Habibur Rahaman
View Reservation
Wed, May 24, 2023
11:00 am - 12:00 pm
Mohammad Habibur Rahaman
View Reservation

Deleted by: Jonathan Hummel

Tue, May 23, 2023
10:00 am - 12:00 pm
Sangyoon Kim
View Reservation
Fri, May 19, 2023
9:00 am - 10:00 am
Mohammad Habibur Rahaman
View Reservation
Records to show:
SOPs
Etch -13 Supercritical Point Dryer SOP.pdf (1.88 MB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2023