Operational Status | ● Online | |||||||||||||||
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Description |
The Branson Barrel Photoresist Stripper is used to remove photoresist residue by means of an oxygen plasma. The Branson minimizes substrate damage. To save wear and tear, excessive chamber cleaning and tool availability of our ICP etchers, please use the Branson rather than the Oxford tools for all photoresist descum etches. |
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Location | FabLab | Photo Tunnel | |||||||||||||||
Manufacturer |
Branson |
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Staff Contact |
Mark Lecates mlecates@umd.edu 301-405-5197 |
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Rates | UMD $71/hr External Non-profit / University $108/hr Small Commercial / MTECH $150/hr Large Commercial $200/hr |
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Reservations | No upcoming reservations at this time. | |||||||||||||||
Logs |
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SOPs |
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Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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Recipes |