Ellipsometer is in vertical mode. Contact John Abrahams is horizontal is needed.
$88/hr - Industry
Contact: John Abrahams firstname.lastname@example.org (301) 405-6664 The J.A. Woollam M-2000D Spectroscopic Ellipsometer, 8” (190-1000nm) is a fully automated measurement tool that measures the optical properties of thin film semiconductor materials, specifically the complex refractive index or dielectric function. Additionally, the Woollam has mapping functionality and the incidence angle can be varied (typically, measurements are made from 60 to 85°). This tool can also measure reflectance and transmission across the entire spectral range.
The Woollam is commonly used for analyzing film thicknesses and optical properties of single layer films, but it can also be used to measure the properties of more complex structures such as multi-layers, interface roughness or inhomogeneous layers. The CompleteEASE software program interfaces with the Woollam to perform the measurements. Data can be collected and analyzed within the CompleteEASE program for determining film properties such as band gap, refractive index, extinction coefficient, thickness, and surface roughness. A regression model characterizes a layer with either an n&k model or a dispersion model (laws including Cauchy, Sellmeier, Forouhi and Tauc Lorentz). Models for various common materials have been created, including Al compounds, Ge compounds, glasses, nitrides, oxides, oxynitrides, semiconductor III-V and II-VI materials, silicon, and silicon compounds.
|Location||FabLab | 2300 KIM (Bldg #225)|
J.A. Woollam M-2000D
|Discussion Link||Metrology Discussion Page
External Non-profit / University
Small Commercial / MTECH
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