November 24, 2017 UMD Home FabLab AIMLab
Back to Equipment List III-V MOCVD Material Growth
Description

Applications

Lasers, detectors, modulators, waveguide devices and photonics integration.

Materials Grown

Single layers, multi-layer heterostructures, quantum wells and superlattices.

  • Lattice matched to InP substrates:
    • InGaAs, InGaAsP, InAlAs, InAlGaAs, AlAsSb, GaAsSb and AlGaAsSb
  • Lattice matched to GaAs substrates:
    • AlAs, AlGaAs and InGaP.
  • On GaSb wafer (or on GaAs wafers with mismatch)
    • InSb, GaSb, AlSb, GaAlsb, InGaSb and GaAsAlSb.
Location UMBC | University of Maryland, Baltimore County, 1000 Hilltop Circle Baltimore, MD 21250
Manufacturer
Staff Contact Fow-Sen Choa
choa@umbc.edu
410-455-3272
Discussion Link Deposition Discussion Page
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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