|Description||The Karl Suss MA-4 Mask Aligner is used with substrates up to 4" (100mm) in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists. Recipes for our standard photoresist processing are attached to the back of the operating instructions below. This system also offers real-time infrared through-wafer backside alignment.|
|Location||FabLab | Photo Tunnel|
Karl Suss MA-4
|Discussion Link||Lithography Discussion Page
External Non-profit / University
Small Commercial / MTECH
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