September 23, 2017 UMD Home FabLab AIMLab
Back to Equipment List MJB-3 Mask Aligner- Left of spin station
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists.
Location FabLab | Teaching Lab
Manufacturer
Staff Contact FabLab Staff
fablab@umd.edu
Discussion Link Lithography Discussion Page
Login Help
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
09/25/2017 12:30 PM 03:30 PM Mark Lecates
09/26/2017 09:00 AM 12:00 PM Mark Lecates

Please login to make a reservation.
Logs
Tue, Sep 26, 2017
9:00 am - 12:00 pm
Mark Lecates
View Reservation
Mon, Sep 25, 2017
12:30 pm - 3:30 pm
Mark Lecates
View Reservation
Fri, Sep 22, 2017
9:00 am - 12:00 pm
Mark Lecates
View Reservation
Wed, Sep 20, 2017
5:30 pm - 6:00 pm
Shengjie Xie
View Reservation
Tue, Sep 19, 2017
9:00 am - 11:30 am
Mark Lecates
View Reservation
Records to show:
SOPs
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2017