November 24, 2017 UMD Home FabLab AIMLab
Back to Equipment List MJB-3 Mask Aligner- Left of spin station
Description The Karl Suss MJB-3 Mask Aligner is used with substrates up to 3" in diameter. It also works for smaller samples. It is a contact/proximity aligner and can be set to utilize either 365 nm or 405 nm light. It is used with a variety of both positive and negative photoresists.
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