May 26, 2022 UMD Home FabLab AIMLab
AJA ATC Orion 8 Sputtering system Back to Equipment List
Operational Status ‚óŹ Online
Description Targets 1-Au, 2-V2O5, 3-W, 4-Li2O, 5-Cu, 6-Si, 7-Li3PO4, 8-Al Please email Jon Hummel at if the target(s) you need are not in the tool the day before you need them. First 2 hours of the run: $75/hr for UMCP NanoCenter members, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial. For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial) This tool is primarily for multiple layer depositions with and without 3 inch masks (3 or more). The AJA 1800 should be used for 1 or 2 layer depositions (example: Cr/Au). Any use of existing Oxide targets (LiMn2O4, LiPO4, LiCoO2) must be approved by FABLAB Staff for additional charges) Precious metals surcharge(10/11): Au & Pd: $82 per 1000A Pt: $70 per 1000A
Location FabLab | FabLab Dep tunnel
Manufacturer AJA International ATC Orion 8
Staff Contact JonathanJonathan Hummel
301 405-5017
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Date Start End User
05/27/2022 09:00 AM 09:00 AM Zoey Warecki
05/30/2022 09:00 AM 05:00 PM Zoey Warecki
Mon, May 30, 2022
9:00 am - 5:00 pm
Zoey Warecki
View Reservation
Continue reservation sc1628cca66671ab
Fri, May 27, 2022
9:00 am - 9:00 am
Zoey Warecki
View Reservation
Continue reservation sc1628cca66671ab
Wed, May 25, 2022
10:00 am - 11:00 am
Haotian Wang
View Reservation
W deposition
Fri, May 20, 2022
11:00 am - 3:00 pm
Haotian Wang
View Reservation
V2O5 deposition.
Thu, May 19, 2022
2:30 pm - 3:30 pm
Haotian Wang
View Reservation
Continuation of reservation #sc162853e29d304d. W deposition.
Records to show:
AJA ATC Orion 8 sputtering tool SOP.pdf (582.57 KB)

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