| Operational Status | ● Online | ||||||||||||
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| Description |
The Kratos AXIS UltraDLD system is a UHV surface analysis system including a
variety of photon, electron, and ion sources and detectors. Possible modes of operation are:
o XPS spectroscopy and imaging, using either monochromatic Al/Ag or non-monochromatic Al/Mg sources, with few 10's micron spatial resolution o UPS spectroscopy using He discharge lamp (He I 21.2eV, He II 40.8 eV) o Scanning Auger electron microscopy (SAM) for spectroscopy and imaging with ~200nm lateral resolution; also secondary electron microscopy (SEM) o Ar/coronene ion gun for sputter depth profiling o Ion scattering spectroscopy (ISS) This system is connected by UHV sample/wafer transfer to the integrated system in ANSLab, accommodating multistep experiments as well as straightforward small samples for standard surface analysis. NOTE: Access to ANSLab is typically limited to the Rubloff group and selected close collaborators outside the group. However, on occasion the Rubloff group develops a collaboration or assists with a service for other outside users. If interested, send an email to rubloff@umd.edu with a brief description of what you are seeking. Minimum charge is for 4 hours, which include sample introduction, alignment, and removal. |
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| Location | ANSLab | 0202 IREAP | ||||||||||||
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| Rates | UMD $75/hr External Non-profit / University $116/hr Small Commercial / MTECH $158/hr Large Commercial $220/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. | ||||||||||||
| Logs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
