March 23, 2023 UMD Home FabLab AIMLab
Kratos UHV surface analysis system Back to Equipment List
Operational Status ‚óŹ Online
Description The Kratos AXIS UltraDLD system is a UHV surface analysis system including a variety of photon, electron, and ion sources and detectors. Possible modes of operation are:

o XPS spectroscopy and imaging, using either monochromatic Al/Ag or non-monochromatic Al/Mg sources, with few 10's micron spatial resolution

o UPS spectroscopy using He discharge lamp (He I 21.2eV, He II 40.8 eV)

o Scanning Auger electron microscopy (SAM) for spectroscopy and imaging with ~200nm lateral resolution; also secondary electron microscopy (SEM)

o Ar/coronene ion gun for sputter depth profiling

o Ion scattering spectroscopy (ISS)

This system is connected by UHV sample/wafer transfer to the integrated system in ANSLab, accommodating multistep experiments as well as straightforward small samples for standard surface analysis.

NOTE: Access to ANSLab is typically limited to the Rubloff group and selected close collaborators outside the group. However, on occasion the Rubloff group develops a collaboration or assists with a service for other outside users. If interested, send an email to with a brief description of what you are seeking. Minimum charge is for 4 hours, which include sample introduction, alignment, and removal.
Location ANSLab | 0202 IREAP
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Fri, Sep 24, 2021
9:00 am - 12:00 pm
Alexander Kozen
View Reservation
3 hours XPS with staff assist rates
Thu, Sep 09, 2021
10:00 am - 4:00 pm
Alexander Kozen
View Reservation
Please bill 6 hours at staff assisted rates
Wed, Jun 12, 2019
8:00 am - 4:00 pm
Chuan-Fu Lin
View Reservation
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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