March 23, 2023 UMD Home FabLab AIMLab
In-situ sensing in Fiji ALD systems (Mario, Luigi) Back to Equipment List
Operational Status ‚óŹ Online
Description Both Fiji ALD systems (Mario and Luigi) in the ALD Nanostructures Lab can be operated using real-time, in-situ sensing to monitor, analyze and control the process. The sensing techniques are:

Woollam M2000 spectroscopic ellipsometry - monitors optical properties of surface during ALD deposition, typically providing monolayer-level sensitivity for thickness measure and insight into ALD process chemistry.

MKS downstream mass spectrometry - monitors ALD reactant and product species, indicating chemical reaction pathways and providing guidance for optimizing process recipes

Either or both techniques can be employed in ALD processes. Fees shown are for each technique.
Location ANSLab | 0202 IREAP
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Tue, Jun 11, 2019
8:00 am - 6:00 pm
Chuan-Fu Lin
View Reservation
Mon, Jun 10, 2019
8:00 am - 6:00 pm
Chuan-Fu Lin
View Reservation
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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