March 26, 2025 UMD Home FabLab AIMLab
Heidelberg MLA150 Maskless Aligner Back to Equipment List
Operational Status ● Online
Description The Maskless Aligner MLA 150 is a state-of-the-art maskless lithography tool. Areas of application include nanofabrication of quantum devices (2D materials, semiconductor materials, nanowires, etc.) MEMS, micro-optical elements, sensors, actuators, MOEMS and other devices for materials and life sciences. Depending on the application, the MLA 150 patterns high-resolution, high aspect ratio, and even simple grayscale structures. It is available with 375nm and 405nm lasers, have pneumatic autofocus, and is able to pattern from 12mm to 6in wafer. Check with resist manufacturer to find the starting dosage. New resists will require optimization.
Location FabLab | Photolithography Tunnel
Manufacturer Heidelberg MLA 150
Staff Contact NamNam Kim
nsk0248@umd.edu
301-405-6664
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
03/27/2025 08:30 AM 12:30 PM Tahir Mahmud
03/27/2025 12:30 PM 02:45 PM Ryan Purcell
03/27/2025 02:45 PM 06:00 PM Tahir Mahmud
03/28/2025 08:30 AM 03:30 PM Tahir Mahmud
03/28/2025 05:00 PM 05:30 PM Chih-Yu Lee
Logs
Mon, Mar 31, 2025
10:00 am - 5:00 pm
Nam Kim
View Reservation
405 laser install
Fri, Mar 28, 2025
5:00 pm - 5:30 pm
Chih-Yu Lee
View Reservation
HZO
Fri, Mar 28, 2025
8:30 am - 3:30 pm
Tahir Mahmud
View Reservation
Thu, Mar 27, 2025
2:45 pm - 6:00 pm
Tahir Mahmud
View Reservation
Thu, Mar 27, 2025
12:30 pm - 2:45 pm
Ryan Purcell
View Reservation
Records to show:
SOPs
SOP for MLA150 V2.docx (10.51 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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