March 23, 2023 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ‚óŹ Online
Description ,p> First 2 hours of the run: $75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-Inconel, 2-ITO, 3-Pt Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.



Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
03/28/2023 09:30 AM 10:30 AM Yudong Li
03/28/2023 12:30 PM 01:00 PM Andrew Evangelista
Logs
Tue, Mar 28, 2023
12:30 pm - 1:00 pm
Andrew Evangelista
View Reservation
Inconel and Gold (70 nm)
Tue, Mar 28, 2023
9:30 am - 10:30 am
Yudong Li
View Reservation
Ta
Tue, Mar 21, 2023
3:00 pm - 5:00 pm
Liuxin Gu
View Reservation
anneal at 250C
Thu, Mar 16, 2023
10:00 am - 10:45 am
Shanchuan Liang
View Reservation
ITO
Wed, Mar 15, 2023
1:00 pm - 2:00 pm
Haochen Yang
View Reservation
Pt
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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