DEP-01: AJA ATC 1800 Sputtering unit

January 16, 2026 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Ti, 2 - Cu, 3 - TiNiCu
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $200 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
01/20/2026	09:00 AM	10:00 AM	Sukanya Goswami

Logs

	Tue, Jan 20, 2026 9:00 am - 10:00 am Sukanya Goswami View Reservation	Si Ti Au
	Mon, Jan 19, 2026 10:00 am - 4:00 pm Lyanne Rivera Vazquez View Reservation	Deleted by: Lyanne Rivera Vazquez Al2O3/Ag. Please place clean chimney. Due to nonstandard sample, Jon will have to place sample directly in the internal chamber (not via loading chamber).
	Fri, Jan 16, 2026 9:00 am - 10:00 am Leon Stevenson View Reservation	Cu, Cr
	Thu, Jan 15, 2026 10:00 am - 1:00 pm Lyanne Rivera Vazquez View Reservation	Al2O3/Ag/ Inc. With overnight pump and clean Al2O3 chimney. In addition, need to coordinate with Jon the prism that will be coated with the fixture since that needs to be installed by opening the inst... more
	Tue, Jan 13, 2026 9:30 am - 7:00 pm Sheng-Wei Wang View Reservation	TiNiCu, Ti, Cu

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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