DEP-01: AJA ATC 1800 Sputtering unit

May 26, 2018 UMD Home FabLab AIMLab

Back to Equipment List AJA ATC 1800 Sputtering unit

Description

Targets 1-Cr, 2,Cu, 3-Au Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

UMD

$71/hr

External Non-profit / University

$108/hr

Small Commercial / MTECH

$150/hr

Large Commercial

$200/hr

Reservations

Date	Start	End	User
05/29/2018	10:00 AM	01:00 PM	Jisoo Shin

Logs

	Tue, May 29, 2018 10:00 am - 1:00 pm Jisoo Shin View Reservation	Ti, Cu W, Al
	Tue, May 15, 2018 1:00 pm - 3:00 pm Emily Hitz View Reservation	Deleted by: Jonathan Hummel
	Tue, May 08, 2018 9:30 am - 11:00 am Emily Hitz View Reservation	Deleted by: Jonathan Hummel
	Mon, May 07, 2018 11:15 am - 1:30 pm Sheung Lu View Reservation	Chromium and Copper targets needed
	Fri, May 04, 2018 12:30 pm - 1:30 pm John Hagopian View Reservation

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

Facilities Links