September 26, 2017 UMD Home FabLab AIMLab
Back to Equipment List AJA ATC 1800 Sputtering unit
Description Targets 1-Mg, 2-Cu, 3-Ag Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Discussion Link Deposition Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Tue, Sep 26, 2017
4:30 pm - 5:00 pm
Bathiya Senevirathna
View Reservation
Cu
Tue, Sep 26, 2017
12:30 pm - 1:15 pm
Sheung Lu
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Cu
Tue, Sep 26, 2017
9:00 am - 11:00 am
Yevgeniy Ostrovskiy
View Reservation

Deleted by: Jonathan Hummel

Mon, Sep 25, 2017
2:00 pm - 3:00 pm
Yonggang Yao
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Mg
Mon, Sep 25, 2017
9:00 am - 11:00 am
Kelsey Gray
View Reservation
ITO
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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