DEP-01: AJA ATC 1800 Sputtering unit

October 11, 2026 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 - Ti, 2 - SiO2, 3 - Al
Please email Dr. Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $300 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Daniel Lewis
dlewis17@umd.edu
301-405-5018

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
10/13/2026	09:30 AM	10:00 AM	Sheng-Wei Wang

Logs

	Tue, Oct 13, 2026 9:30 am - 10:00 am Sheng-Wei Wang View Reservation	SiO2
	Fri, Oct 09, 2026 9:30 am - 10:00 am Sheng-Wei Wang View Reservation	SiO2
	Wed, Oct 07, 2026 1:00 pm - 2:00 pm Haotong Liang View Reservation	Platinum, 25 nm = $25 Training with Daniel Lewis
	Wed, Oct 07, 2026 10:00 am - 1:00 pm Lyanne Rivera Vazquez View Reservation	Targets: Pt / Si / Inconel. preferable with an overnight pump. The amount of Pt used will be 40nm. Also, I placed this stretch of reservation time in case there are hiccups on the tool and I do no... more
	Tue, Oct 06, 2026 10:00 am - 1:00 pm Lyanne Rivera Vazquez View Reservation	Targets: Ti/Al2O3. Please use a clean chimney for Al2O3 and preferable with an overnight pump. Also, I placed this stretch of reservation time in case there are hiccups on the tool and I do not ta... more

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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