June 30, 2025 UMD Home FabLab AIM Lab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ● Online
Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1-Co, 2-Al, 3-Ni
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $140 per 1000A
Pt: $100 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
07/01/2025 10:30 AM 02:00 PM Lyanne Rivera Vazquez
07/02/2025 10:00 AM 02:45 PM Stefan Theodoru
07/02/2025 03:00 PM 04:00 AM Stefan Theodoru
07/03/2025 05:00 AM 09:30 AM Stefan Theodoru
Logs
Thu, Jul 03, 2025
5:00 am - 9:30 am
Stefan Theodoru
View Reservation
V2O5
Wed, Jul 02, 2025
3:00 pm - 4:00 am
Stefan Theodoru
View Reservation
Overnight LiPON
Wed, Jul 02, 2025
10:00 am - 2:45 pm
Stefan Theodoru
View Reservation
V2O5 dep using V target
Tue, Jul 01, 2025
10:30 am - 2:00 pm
Lyanne Rivera Vazquez
View Reservation
Al/Co/Ni
Mon, Jun 30, 2025
9:30 am - 2:30 pm
Mohammed Haruna
View Reservation
ITO
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2025