DEP-01: AJA ATC 1800 Sputtering unit

November 2, 2025 UMD Home FabLab AIM Lab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1 -Inconel, 2 - Al2O3, 3 - Pt
Please email Jon Hummel at jhummel1@umd.edu or Daniel Lewis at dlewis17@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $200 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

No upcoming reservations at this time.

Logs

	Thu, Oct 30, 2025 6:00 pm - 7:00 pm Sheng-Wei Wang View Reservation	Al2O3
	Thu, Oct 30, 2025 5:00 pm - 6:00 pm Sheng-Wei Wang View Reservation	Al2O3
	Wed, Oct 29, 2025 5:00 pm - 5:30 pm Sheng-Wei Wang View Reservation
	Tue, Oct 28, 2025 10:00 am - 11:00 am Lyanne Rivera Vazquez View Reservation	Inconel/ Al2O3/
	Fri, Oct 24, 2025 4:00 pm - 5:30 pm Yi-Siou Huang View Reservation	Pt 90nm =$90 Ti SiO2

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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