March 29, 2024 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ● Online
Description

First 2 hours of the run:
$75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.

For runs over 2 hours:
$10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-Fe, 2-Al2O3, 3-Inconel
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(10/11):
Au: $82 per 1000A
Pt: $70 per 1000A

Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations
Date Start End User
03/29/2024 09:00 AM 11:00 AM Andrew Evangelista
Logs
Fri, Mar 29, 2024
9:00 am - 11:00 am
Andrew Evangelista
View Reservation
Aluminum, Iron, Inconel
Thu, Mar 28, 2024
9:00 am - 11:30 am
William Schubert
View Reservation
Fe
Tue, Mar 26, 2024
10:30 am - 11:30 am
Andrew Evangelista
View Reservation
Alumina, Iron, Inconel
Fri, Mar 15, 2024
12:00 pm - 1:00 pm
Hongyi Sun
View Reservation
Alumina
Fri, Mar 15, 2024
10:30 am - 11:30 am
Andrew Evangelista
View Reservation
Iron, Inconel, Alumina
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2024