May 26, 2022 UMD Home FabLab AIMLab
AJA ATC 1800 Sputtering unit Back to Equipment List
Operational Status ‚óŹ Online
Description ,p> First 2 hours of the run: $75/hr for UMCP NanoCenter users, $116 for Non-Profit(including government)s, $158 for small commercial; $220 for commercial.
For runs over 2 hours: $10/hr per hour for UMCP NanoCenter members; ($17/hr for non-profits(government included); $28 for commercial)

Targets 1-V, 2-Li3PO4, 3-Au Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.



Precious metals surcharge(10/11):

Au: $82 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer AJA International ATC 1800-V
Link
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
05/27/2022 09:00 AM 07:00 PM Zoey Warecki
05/30/2022 09:00 AM 12:00 PM Zoey Warecki
06/01/2022 01:00 PM 02:00 PM Mehdi Kabirnajafi
Logs
Wed, Jun 01, 2022
1:00 pm - 2:00 pm
Mehdi Kabirnajafi
View Reservation
VO2/Ti
Mon, May 30, 2022
9:00 am - 12:00 pm
Zoey Warecki
View Reservation
Continue reservation sc1628cca66671ab
Fri, May 27, 2022
9:00 am - 7:00 pm
Zoey Warecki
View Reservation
Continue reservation sc1628cca66671ab
Thu, May 26, 2022
9:00 am - 9:00 am
Zoey Warecki
View Reservation
Continue reservation sc1628cca66671ab
Wed, May 25, 2022
9:00 am - 9:00 am
Zoey Warecki
View Reservation
V, LiPO4, and Au.
Records to show:
SOPs
dep-01_sop_AJA_sputtering.pdf (673.12 KB)
index.php (38 B)
Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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