DEP-01: AJA ATC 1800 Sputtering unit

April 15, 2025 UMD Home FabLab AIMLab

AJA ATC 1800 Sputtering unit Back to Equipment List

Operational Status

● Online

Description

First 2 hours of the run:
$81/hr for UMCP NanoCenter users, $126 for Non-Profit(including government)s, $166 for small commercial; $242 for commercial.

For runs over 2 hours:
$11/hr per hour for UMCP NanoCenter members; ($18/hr for non-profits(government included); $29 for commercial)

Targets 1- Ag, 2-Al2O3, 3-Inconel
Please email Jon Hummel at jhummel1@umd.edu if the targets(s) you need are not in the tool the day before you need them.

Precious metals surcharge(7/18):
Au: $110 per 1000A
Pt: $100 per 1000A

Location

FabLab | DEP Tunnel

Manufacturer

AJA International ATC 1800-V
Link

Staff Contact

Jonathan Hummel
jhummel1@umd.edu
301 405-5017

Rates

No Charge

$0/hr

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

Reservations

Date	Start	End	User
04/16/2025	09:45 AM	02:30 PM	Lyanne Rivera Vazquez
04/18/2025	08:30 AM	10:00 AM	Jay Easter

Logs

	Fri, Apr 18, 2025 8:30 am - 10:00 am Jay Easter View Reservation	Au 10000 angstroms $$1100
	Wed, Apr 16, 2025 9:45 am - 2:30 pm Lyanne Rivera Vazquez View Reservation	Al2O3/Ag/ Inconel
	Tue, Apr 15, 2025 8:00 am - 2:00 pm Lisa Hanke View Reservation	Cu, TiNiHf
	Mon, Apr 14, 2025 1:00 pm - 1:30 pm Chi Won Ahn View Reservation	Au 500 angstroms total $55
	Fri, Apr 11, 2025 12:30 pm - 2:00 pm Yi-Siou Huang View Reservation	Deleted by: Jonathan Hummel Ag

SOPs

dep-01_sop_AJA_sputtering.pdf (673.12 KB)

index.php (38 B)

Manuals

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Recipes

Deposition Targets

sputtering_targets.xls (16.5 KB)
target_info.xls (23 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-01: AJA ATC 1800 Sputtering unit

Deposition Targets

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