March 26, 2025 UMD Home FabLab AIMLab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Fri, Mar 21, 2025
1:30 pm - 3:30 pm
Neil Shah
View Reservation
10 nm chrome Gold charge. $88.00 80 nm gold
Fri, Mar 21, 2025
11:00 am - 1:30 pm
Joshua Wang
View Reservation
Sat, Mar 15, 2025
2:15 pm - 4:00 pm
Liuxin Gu
View Reservation
Fri, Mar 14, 2025
7:00 pm - 9:30 pm
Yixiao Wang
View Reservation
5nmCr + 90nm Au $99
Sun, Jan 19, 2025
10:00 pm -
Xiaodong Zhao
View Reservation
Cr 30nm, Au 50nm $55
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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