June 30, 2025 UMD Home FabLab AIM Lab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
07/01/2025 10:30 AM 12:00 PM Linfeng Ai
07/01/2025 02:30 PM 04:45 PM Pranshoo Upadhyay
Logs
Tue, Jul 01, 2025
2:30 pm - 4:45 pm
Pranshoo Upadhyay
View Reservation
Cr (5nm) / Au (70 nm) - Au: 77usd
Tue, Jul 01, 2025
10:30 am - 12:00 pm
Linfeng Ai
View Reservation
Gold
Thu, Jun 26, 2025
5:30 pm - 7:30 pm
Shanchuan Liang
View Reservation
Cr/Au 5/50 nm Gold charge=$70
Tue, Jun 24, 2025
6:30 pm - 8:00 pm
Yixiao Wang
View Reservation
Overnight pump Cr 5nm + Cu 10nm
Tue, Jun 24, 2025
4:30 pm - 6:00 pm
Ti Xie
View Reservation
Cr/Au 5/25 nm $35
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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