July 14, 2026 UMD Home FabLab AIM Lab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu . It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $300 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact DanielDaniel Lewis
dlewis17@umd.edu
301-405-5018
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Mon, Jul 13, 2026
5:30 pm - 7:30 pm
Rosalin Mohanty
View Reservation
5nm Cr and 25 nm Au
Mon, Jul 13, 2026
11:00 am - 12:30 pm
Yuwei Sun
View Reservation
5nm Cr + 25nm Au Gold charge=$75
Fri, Jul 10, 2026
3:00 pm - 5:00 pm
Yuwei Sun
View Reservation

Deleted by: Yuwei Sun

Cr 5nm+Au 25nm = $75
Mon, Jul 06, 2026
2:00 pm - 4:00 pm
Joshua Wang
View Reservation
5 nm Cr and 7 nm Au Gold charge=$21
Mon, Jul 06, 2026
12:00 pm - 2:00 pm
Rosalin Mohanty
View Reservation
5 nm Cr and 25 nm Au Gold charge=$75
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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