May 28, 2022 UMD Home FabLab AIMLab
Metra Thermal Evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations
Date Start End User
05/31/2022 09:00 AM 12:00 PM Cory Bomberger
Logs
Tue, May 31, 2022
9:00 am - 12:00 pm
Cory Bomberger
View Reservation
Fri, May 27, 2022
2:30 pm - 4:00 pm
Ti Xie
View Reservation
Cr/Au 5/50 nm $46
Thu, May 26, 2022
3:30 pm - 5:00 pm
Ti Xie
View Reservation
Cr/Au 5/50 nm $46
Fri, May 20, 2022
1:00 am - 2:30 am
Ti Xie
View Reservation
Cr/Au 5/50 nm $46
Thu, May 19, 2022
1:45 pm - 5:30 pm
Zhiyin Tu
View Reservation
10nm Cr / 57 nm Au
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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