November 24, 2017 UMD Home FabLab AIMLab
Back to Equipment List Metra Thermal Evaporator
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
Discussion Link Deposition Discussion Page
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External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Wed, Nov 22, 2017
3:00 pm - 5:00 pm
Peng Wang
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Fri, Nov 17, 2017
10:30 am - 12:30 pm
Thomas Mumford
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100 A Au
Tue, Nov 14, 2017
1:30 pm - 4:30 pm
Tao Cai
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deposition of gold 10 nm
Sun, Nov 12, 2017
10:00 pm - 11:30 pm
Zhongjie Huang
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Au, 50 nm, $31.5
Sat, Nov 11, 2017
8:30 pm - 10:30 pm
Zhongjie Huang
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Au, 1000 A, $63
Records to show:
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)

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Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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