November 21, 2024 UMD Home FabLab AIMLab
Metra Thermal Evaporator Back to Equipment List
Operational Status ● Online
Description The Metra Thermal Evaporator is used to deposit a variety of metals and dielectrics using resistance heating. Some, but not all, of the materials include: Cr, Au, Ag, Cu and Al. It has two thermal sources but only one can be run at a time. Buy switching the power leads, a user can evaporate up to two different materials in the same pump down cycle. The Metra will accommodate up to 4" diameter substrates. Precious metals surcharge Au: $110 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Metra
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$81/hr
External Non-profit / University
$126/hr
Small Commercial / MTECH
$166/hr
Large Commercial
$242/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Nov 20, 2024
6:30 pm - 8:00 pm
Rundong Ma
View Reservation
Wed, Nov 20, 2024
2:00 pm - 3:30 pm
Beini Gao
View Reservation
Wed, Nov 20, 2024
11:15 am - 2:00 pm
Pranshoo Upadhyay
View Reservation
5nm Cr, 70 nm Au; Au: $77
Tue, Nov 19, 2024
3:30 pm - 6:00 pm
Xiaodong Zhao
View Reservation
thermal evaperate 30nm Cr and 50nm Au Gold charge=$55
Tue, Nov 19, 2024
9:30 am - 12:00 pm
Thomas Loughran
View Reservation
Records to show:
SOPs
dep-02_sop_metra_thermal_evap.pdf (131 KB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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