November 24, 2017 UMD Home FabLab AIMLab
Back to Equipment List LP-CVD Furnace
Description The single-tube CVD furnace is used for growing gate oxide, poly silicon, spin on glass dopant drive-in and contact anneals. Different tubes are used for different processes.

This furnace is for the use of FabLab staff only.
Location FabLab | CVD Tunnel
Manufacturer CVD Systems
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
Login Help
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Tue, Jan 03, 2012
11:00 am - 12:00 pm
Chuanfu Sun
View Reservation
Thu, Dec 15, 2011
9:30 am - 2:00 pm
Chuanfu Sun
View Reservation

Deleted by: Chuanfu Sun

Wed, Dec 14, 2011
9:45 am - 2:00 pm
Chuanfu Sun
View Reservation
Fri, Jun 24, 2011
12:30 pm - 2:00 pm
Ben Cooper
View Reservation
Mon, Oct 11, 2010
1:00 pm - 2:30 pm
Hongwei Liao
View Reservation
500A of poly @ 500C
Records to show:
SOPs
cvd-05_sop.pdf (270.21 KB)
index.php (38 B)
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2017