| Operational Status | ● Offline | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description |
The single-tube CVD furnace is used for growing gate oxide, poly silicon, spin on glass dopant drive-in and contact anneals. Different tubes are used for different processes.
This furnace is for the use of FabLab staff only. |
|||||||||||||||
| Location | FabLab |
CVD Tunnel
|
|||||||||||||||
| Manufacturer |
CVD Systems |
|||||||||||||||
| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
|||||||||||||||
| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
|||||||||||||||
| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs |
|
|||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
| Recipes |
