March 23, 2023 UMD Home FabLab AIMLab
LP-CVD Furnace Back to Equipment List
Operational Status ‚óŹ Online
Description The single-tube CVD furnace is used for growing gate oxide, poly silicon, spin on glass dopant drive-in and contact anneals. Different tubes are used for different processes.

This furnace is for the use of FabLab staff only.
Location FabLab | CVD Tunnel
Manufacturer CVD Systems
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Tue, Jan 03, 2012
11:00 am - 12:00 pm
Chuanfu Sun
View Reservation
Thu, Dec 15, 2011
9:30 am - 2:00 pm
Chuanfu Sun
View Reservation

Deleted by: Chuanfu Sun

Wed, Dec 14, 2011
9:45 am - 2:00 pm
Chuanfu Sun
View Reservation
Fri, Jun 24, 2011
12:30 pm - 2:00 pm
Ben Cooper
View Reservation
Mon, Oct 11, 2010
1:00 pm - 2:30 pm
Hongwei Liao
View Reservation
500A of poly @ 500C
Records to show:
cvd-05_sop.pdf (270.21 KB)
index.php (38 B)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland