|Operational Status||● Online|
|Description||Working with wet chemicals can be hazardous if you don't follow the proper procedures at all times. Violating procedure risks not only your health but also the health and safety of other users and may result in loss of access to FabLab for an extended period of time.|
|Location||FabLab | ETCH Tunnel|
External Non-profit / University
Small Commercial / MTECH
|Reservations||No upcoming reservations at this time.|
You must have lab permissions to view the manuals.
Please login to view manuals or contact the lab staff to obtain permissions.
Wet Etch Recipescolor_chart_for_SiO2_film_thickness.doc (86 KB)
etch_rate_for_micromechanical_process_Williams+Gupta+Wasilik.pdf (1.02 MB)
seminconductor_processing_recipes.doc (37.5 KB)
silicon_etching_and_cleaning.doc (176 KB)
wet_etch_121500.pdf (13.43 KB)