March 24, 2023 UMD Home FabLab AIMLab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ‚óŹ Waiting for part/service
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source Handles up to 4" diameter substrates Substrate heating to 300 C O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, Mar 09, 2023
10:00 am - 1:30 pm
Haochen Yang
View Reservation
Pd deposition Palladium charge=$50
Wed, Mar 01, 2023
- 11:00 am
Thomas Loughran
View Reservation

Deleted by: Thomas Loughran

Tue, Feb 28, 2023
9:00 am - 11:00 am
Peter Snapp
View Reservation
Sn02 deposition @ 250C
Thu, Feb 23, 2023
- 10:00 am
Thomas Loughran
View Reservation
Wed, Feb 22, 2023
8:00 am - 11:45 pm
Thomas Loughran
View Reservation

Deleted by: Thomas Loughran

Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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