| Operational Status | ● Online | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description |
The custom-built Denton Evaporator is a multi source evaporator with the following features:
4-pocket electron beam evaporation source
Handles up to 4" diameter substrates
Substrate heating to 300 C
O2 and Ar gas inlets for reactive deposition (MFC controlled)
Laser diode coating flip fixture allows multiple coating during a single pump down cycle
Precious metals surcharge(10/11): Au: $110 per 100nm Pt: $100 per 100nm, Pd: $110 per 100nm |
|||||||||||||||
| Location | FabLab |
DEP Tunnel
|
|||||||||||||||
| Manufacturer |
Denton |
|||||||||||||||
| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
|||||||||||||||
| Rates | UMD $81/hr External Non-profit / University $126/hr Small Commercial / MTECH $166/hr Large Commercial $242/hr No Charge $0/hr |
|||||||||||||||
| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs |
|
|||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
| Recipes |
