May 26, 2022 UMD Home FabLab AIMLab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, May 17, 2022
3:15 pm - 4:15 pm
Heshan Yu
View Reservation
Wed, May 11, 2022
3:30 pm - 4:45 pm
Heshan Yu
View Reservation
SiO2
Thu, May 05, 2022
3:30 pm - 5:00 pm
Heshan Yu
View Reservation
Wed, May 04, 2022
2:00 pm - 3:30 pm
Heshan Yu
View Reservation

Deleted by: Heshan Yu

SiO2
Wed, May 04, 2022
10:00 am - 1:00 pm
Thomas Loughran
View Reservation

Deleted by: Thomas Loughran

Al Au deposition
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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