June 30, 2025 UMD Home FabLab AIM Lab
Denton Ebeam/thermal evaporator Back to Equipment List
Operational Status ● Online
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source Handles up to 4" diameter substrates Substrate heating to 300 C O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $110 per 100nm Pt: $100 per 100nm, Pd: $110 per 100nm
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
Large Commercial
$242/hr
No Charge
$0/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Mon, Jun 30, 2025
11:00 am - 1:00 pm
Harold Park
View Reservation
1 kA Pd = $110
Fri, Jun 27, 2025
2:00 pm - 5:00 pm
Harold Park
View Reservation

Deleted by: Daniel Lewis

Fri, Jun 27, 2025
1:00 pm - 5:00 pm
Daniel Lewis
View Reservation
Fri, Jun 27, 2025
11:00 am - 1:00 pm
Konstantin Davydov
View Reservation
Wed, Apr 09, 2025
- 2:00 am
BINH HOANG
View Reservation
15nm of LiF
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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