November 20, 2017 UMD Home FabLab AIMLab
Back to Equipment List Denton Ebeam/thermal evaporator
Description The custom-built Denton Evaporator is a multi source evaporator with the following features: 4-pocket electron beam evaporation source One resistance-heated thermal evaporation source In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition O2 and Ar gas inlets for reactive deposition (MFC controlled) Laser diode coating flip fixture allows multiple coating during a single pump down cycle Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A
Location FabLab | DEP Tunnel
Manufacturer Denton
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Deposition Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Fri, Nov 17, 2017
10:00 am - 3:00 pm
Zackery Benson
View Reservation
Ag/SiO2/Mg deposition
Thu, Nov 16, 2017
6:15 pm - 9:15 pm
Xinyuan Chong
View Reservation
55nm Au ($34.65)
Thu, Nov 16, 2017
9:30 am - 12:30 pm
Zackery Benson
View Reservation
SiO2 deposition
Wed, Nov 15, 2017
4:00 pm - 5:30 pm
Xinyuan Chong
View Reservation
Extend previous reservation for cooling
Wed, Nov 15, 2017
12:30 pm - 3:30 pm
Xinyuan Chong
View Reservation
Pt 100nm ($70)
Records to show:
SOPs
Denton SOP rev1.pdf (1.54 MB)
index.php (38 B)
Manuals

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Recipes

Evaporation Recipes

evapguide.pdf (180.42 KB)

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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