| Operational Status | ● Online | |||||||||||||||
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| Description |
The custom-built Denton Evaporator is a multi source evaporator with the following features:
4-pocket electron beam evaporation source
One resistance-heated thermal evaporation source
In-situ Ion Beam substrate cleaning and ion-assisted depositionHandles up to 4" diameter substrates
Substrate heating to 300 C, backside cooling with LN2 for low temperature deposition
O2 and Ar gas inlets for reactive deposition (MFC controlled)
Laser diode coating flip fixture allows multiple coating during a single pump down cycle
Precious metals surcharge(10/11): Au: $92 per 100nm Pt: $70 per 100nm, Pd: $82 per 100nm |
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| Location | FabLab |
DEP Tunnel
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| Manufacturer |
Denton |
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| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
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| Rates | UMD $75/hr External Non-profit / University $116/hr Small Commercial / MTECH $158/hr Large Commercial $220/hr No Charge $0/hr |
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| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
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| SOPs |
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| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
