February 25, 2018 UMD Home FabLab AIMLab
Back to Equipment List Raith e_LiNE
Description The Raith e_line is a versatile e-beam system for nano structuring and patterning using a TFE filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides.

This tool is to be used only as an Ebeam writer. For runs longer than 4-5 hours please start your run in the evening and let it run over night. If you need SEM images please see a FabLab Staff member for imaging on the Hitachi S3400N, the JEOL JSM-6400 or the NISP Lab Staff on the SU-70.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
jhummel1@umd.edu
301 405-5017
Rates
UMD
$41/hr
External Non-profit / University
$63/hr
Small Commercial / MTECH
$93/hr
Large Commercial
$150/hr
Reservations No upcoming reservations at this time.
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Logs
Sun, Feb 25, 2018
9:00 am -
Yiwen Hu
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Deleted by: Yiwen Hu

Sat, Feb 24, 2018
9:00 am - 9:00 pm
Yiwen Hu
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Deleted by: Yiwen Hu

Fri, Feb 23, 2018
6:00 pm - 10:00 pm
Yiwen Hu
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Deleted by: Yiwen Hu

Fri, Feb 23, 2018
4:30 pm - 6:30 pm
Jiahao Zhan
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Fri, Feb 23, 2018
10:00 am - 12:00 pm
Shahriar Aghaeimeibodi
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Records to show:
SOPs
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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