February 25, 2018 UMD Home FabLab AIMLab
Back to Equipment List Raith e_LiNE
Description The Raith e_line is a versatile e-beam system for nano structuring and patterning using a TFE filament for ultra high resolution capability. Patterns can be done in either stitching mode or "Fixed Beam Moving Stage" mode. FBMS eliminates stitching errors on larger structures such as wave guides.

This tool is to be used only as an Ebeam writer. For runs longer than 4-5 hours please start your run in the evening and let it run over night. If you need SEM images please see a FabLab Staff member for imaging on the Hitachi S3400N, the JEOL JSM-6400 or the NISP Lab Staff on the SU-70.

Location FabLab | Exploratory Lab
Manufacturer Raith
Staff Contact JonathanJonathan Hummel
301 405-5017
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Sun, Feb 25, 2018
9:00 am -
Yiwen Hu
View Reservation

Deleted by: Yiwen Hu

Sat, Feb 24, 2018
9:00 am - 9:00 pm
Yiwen Hu
View Reservation

Deleted by: Yiwen Hu

Fri, Feb 23, 2018
6:00 pm - 10:00 pm
Yiwen Hu
View Reservation

Deleted by: Yiwen Hu

Fri, Feb 23, 2018
4:30 pm - 6:30 pm
Jiahao Zhan
View Reservation
Fri, Feb 23, 2018
10:00 am - 12:00 pm
Shahriar Aghaeimeibodi
View Reservation
Records to show:
index.php (38 B)
photo-01_Info_RAITH150.pdf (309.16 KB)
photo-01_Info_e_LiNE.pdf (379.32 KB)
photo-01_application_note_FBMS.pdf (196.72 KB)
photo-01_e_LiNE_technical_description.pdf (716.67 KB)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland