Operational Status | ● Online | |||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Description |
![]() For runs longer than 4-5 hours please start your run in the evening and let it run over night. |
|||||||||||||||
Location | FabLab | Exploratory Lab SEM room | |||||||||||||||
Manufacturer |
Raith |
|||||||||||||||
Staff Contact |
![]() jhummel1@umd.edu 301 405-5017 |
|||||||||||||||
Rates | Large Commercial $182/hr Small Commercial / MTECH $103/hr External Non-profit / University $73/hr UMD $47/hr No Charge $0/hr |
|||||||||||||||
Reservations | No upcoming reservations at this time. | |||||||||||||||
Logs |
|
|||||||||||||||
SOPs |
|
|||||||||||||||
Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
Recipes | Photoresist ProcessesAZ4620_process.doc (25.5 KB)NPR9 process.doc (24.5 KB) NR9-1500PY.pdf (88.62 KB) SPR220_resist_process.doc (25.5 KB) baseline_shipley_1813_resist_chlorobenzene_lift.doc (28 KB) chlorobenzene_lift.doc (28.5 KB) photo_resist_pouring_procedure.doc (24 KB) shipley_1813_positive_photolithography_process.doc (27 KB) |